Sensors & Transducers Journal
(ISSN 1726- 5479)
Vol. 73, Issue 11, November 2006, pp. 810-818
Investigation of Pull-In Phenomenon of Rectangular Micro-Plate Subjected
to Nonlinear Electrostatic Pressure
1,3Agricultural Machinery Dept. Urmia University, Urmia, Iran
2Mech. Eng. Dept. Urmia University, Urmia, Iran
Received: 16 October 2006 /Accepted: 30 November 2006 /Published: 4 December 2006
Abstract: In the present work a pull-in voltage of a micro plate subjected to nonlinear electrostatic pressure was studied. The governing equation was derived and in order to linearize the nonlinear governing equation; step-by-step linearization method was used and finite difference method was applied to discretize the linearized equation. The numerical results reveal that the step-by-step linearization method is highly efficient, fast and easiest one to calculate the pull-in voltage. The obtained results for different size of micro plate, initial gap and thickness were shown those effects on the pull-in voltage.
Keywords: Pull-In Phenomenon; Rectangular micro plate; Nonlinear electrostatic pressure; Step by Step Linearization method; Finite difference method
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