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Special Issue, October 2007, pp. 76-83




Fabry-Perot Diaphragm Fiber Optic Sensor (DFOS) for Acoustic Detection


Yan SUN, Guanhua FENG, George GEORGIOU, Edip NIVER, *Karen NOE

and Ken CHIN

Department of Physics, Materials Science Program, New Jersey Institute of Technology

161 Warren St., Newark, NJ 07102, USA

*PSE&G Corporation, Newark, NJ, USA

Tel.: 1-973-642-7738

E-mail: ys2@njit.edu



Received: 17 September 2007   /Accepted: 19 September 2007   /Published: 8 October 2007


Abstract: A diaphragm fiber optic sensor (DFOS) solely based on Fabry-Perot multiple beam interference has been designed and fabricated with micro-electric mechanical system (MEMS) technology. The silicon diaphragm with an embossed center was designed with an interference gap width kept accurately. The DFOS was verified to be a truly and purely Fabry-Perot device via a critical test. Parallel testing with a Piezoelectric (PZT) sensor showed that the DFOS had high sensitivity. The Fabry-Perot DFOS also demonstrated excellent performance in on-line monitoring of Partial Discharge (PD) in power transformers.


Keywords: MEMS, Fabry-Perot, Fiber optic, Acoustic, Diaphragm with embossed center


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