Sensors & Transducers Journal
(ISSN 1726- 5479)
Special Issue, October 2007, pp. 76-83
Fabry-Perot Diaphragm Fiber Optic Sensor (DFOS) for Acoustic Detection
Yan SUN, Guanhua FENG, George GEORGIOU, Edip NIVER, *Karen NOE
and Ken CHIN
Department of Physics, Materials Science Program, New Jersey Institute of Technology
161 Warren St., Newark, NJ 07102, USA
*PSE&G Corporation, Newark, NJ, USA
Received: 17 September 2007 /Accepted: 19 September 2007 /Published: 8 October 2007
Abstract: A diaphragm fiber optic sensor (DFOS) solely based on Fabry-Perot multiple beam interference has been designed and fabricated with micro-electric mechanical system (MEMS) technology. The silicon diaphragm with an embossed center was designed with an interference gap width kept accurately. The DFOS was verified to be a truly and purely Fabry-Perot device via a critical test. Parallel testing with a Piezoelectric (PZT) sensor showed that the DFOS had high sensitivity. The Fabry-Perot DFOS also demonstrated excellent performance in on-line monitoring of Partial Discharge (PD) in power transformers.
Keywords: MEMS, Fabry-Perot, Fiber optic, Acoustic, Diaphragm with embossed center
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