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Vol. 11, Special Issue, April 2011, pp.10-22



A Fully Symmetric and Completely Decoupled MEMS-SOI Gyroscope


1,2Abdelhameed SHARAF, 2Sherif SEDKY, 3Mohamed SERRY, 3Amro ELSHURAFA, 1Mahmoud ASHOUR and 4S. E.-D. HABIB

1Egyptian Atomic Energy Authority, Cairo, Egypt

2American University in Cairo, Cairo, Egypt

3King Abdullah University of Science and Technology, Thuwal, Saudi Arabia

4Electronics and Communications Dept., Faculty of Engineering, Cairo University, Egypt



Received: 10 December 2010   /Accepted: 15 March 2011   /Published: 5 April 2011


Abstract: This paper introduces a novel MEMS gyroscope that is capable of exciting the drive mode differentially. The structure also decouples the drive and sense modes via an intermediate mass and decoupling beams. Both drive and sense modes are fully differential enabling control over the zero-rate-output for the former and maximizing output sensitivity using a bridge circuit for the latter. Further, the structure is fully symmetric about the x- and y- axes which results in minimizing the temperature sensitivity problem. Complete analytical analysis based on the equations of motion was performed and verified using two commercially available finite element software packages. Results from both methods are in good agreement. The analysis of the sensor shows an electrical sensitivity of 1.14 (mV/(/s)). The gyroscope was fabricated using single mask and deep reactive ion etching. The measurement of the resonance frequency performed showing a good agreement with the analytical and numerical analysis.


Keywords: Gyroscopes, MEMS, Silicon-on-Insulator, Mechanical sensitivity, Reactive ion etching


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