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Vol. 17, Special Issue, December 2012, pp. 1-12


Selected papers from the 4th International Conference on Intelligent & Advanced Systems (ICIAS' 2012),

12-14 June 2012, Malaysia, Kuala Lumpur




Modeling and Layout Design of Resonant Lateral Comb Magnetic Sensor
1 F. Ahmad, 2 J. O. Dennis, 1 M. H. Md Khir and 1 N. H. Hamid

1 Department of Electrical and Electronic Engineering

2 Department of Fundamental and Applied Sciences

Universiti Teknologi PETRONAS, Bandar Seri Iskandar 31750 Tronoh,

Perak Darul Ridzuan, Malaysia

Tel.: +605-368 7829, fax: +605-365 5905

E-mail: ahmad123farooq@gmail.com, johndennis@petronas.com.my



Received: 29 September 2012   /Accepted: 29 October 2012   /Published: 18 December 2012

Digital Sensors and Sensor Sysstems


Abstract: This paper covers the modeling and layout design of CMOS resonant lateral comb magnetic sensor capable of measuring magnetic field in the nanotesla range. The actuation mechanism of this sensor is based on differential electrostatic along with Lorentz force and sensing is piezoresistive. Cadence virtuoso is used to create the layout of resonant magnetic sensor according to design rules of MIMOS Bhd. All CMOS layers i.e. three metal and two poly layers are used in the structure to fabricate the magnetic sensor to enhance the sensitivity. At sensor output, without any amplification its sensitivity is 1.4807 μV/μT at 0.001 damping ratio with quality factor 500 and resonant frequency 9.35 kHz.


Keywords: MEMS resonators, Interdigitated fingers, Lorentz force, Differential electrostatic actuators and PZR sensing



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