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Best Articles 2011




Intelligent Data Acquisition and Information Process Technologies
and Their Applications. Part II.




Vol. 19, Special Issue, February 2013, pp.83-88



A Reflective Grating Microcantilever Biosensor


a, c* Feng Wen, a Yuejin Zhao, b Xiaomei Yu, a Cheng Gong, b Jiancheng Yang

a School of Optoelectronics, Beijing Institute of Technology, Beijing, 100081, China

b National Key Laboratory of Science and Technology on Micro/Nano Fabrication,
Institute of Microelectronics, Peking University, Beijing 100871, China

c National Key Laboratory for Electronic Measurement Technology,
North University of China, Cheng Taiyuan, 030051, China

* Tel.: 13620610819

E-mail: 200908@bit.edu.cn, nucwenfeng@163.com


Received: 28 December 2012   /Accepted: 28 January 2013   /Published: 19 February 2013

Digital Sensors and Sensor Sysstems


Abstract: For measuring the deflections of the microcantilever biosensor, a reflective grating microcantilevers based on SOI were designed and fabricated, a high precision optical readout approach based on diffraction spectrum balancing feedback control was presented. The diffraction spectrum image was collected by a 12-bit digital area array monochrome CCD. According to the sum gray value of the image which subtracted each other at the balancing position and bending position to control a high precision motorized rotation stage revolve make the sum gray value remained in the balancing position always, then the motorized rotation stage revolving angle is just the cantilever bend angle. The resolution of motorized rotation stage is 35 10-6 deg, the system practical measurement resolution is 1 10-4 deg, that is to say, for a length of 250 um microcantilever, the tip measure resolution is up to 0.043 nm. Measurement results clearly demonstrate that this reflective grating microcantilever biosensor and this read out method has enormous potential application prospect in biological detecting.


Keywords: Reflecting grating, Microcantilever, Diffraction, Feedback balancing, CCD


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