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Special Issue, Vol. 3, December 2008, pp.3-13

 

 

Bullet

 

Novel Synchronous Linear and Rotatory Micro Motors Based on Polymer Magnets

with Organic and Inorganic Insulation Layers

 

Andreas WALDSCHIK, Marco FELDMANN and Stephanus BÜTTGENBACH

Institute for Microtechnology, Technische Universität Braunschweig,

Alte Salzdahlumerstr. 203, 38124 Braunschweig, Germany

Tel.: +49-531-391-9761, fax: +49-531-391-9751

E-mail: a.waldschik@tu-bs.de, www.imt.tu-bs.de

 

 

Received: 31 October 2008   /Accepted: 7 November 2008   /Published: 8 December 2008

 

Abstract: In this work, we report on the development of several synchronous motors with rotatory or linear movements. The synchronous micro motors are brushless DC motors or stepper motors with electrically controlled commutation consisting of a stator and a rotor. The rotor is mounted onto the stator and is adjusted by an integrated guidance. Inside the stator different coil systems are realized, like double layer sector coils or special nested coils. The coil systems can be controlled by three or six phases depending on the operational mode. Furthermore, inorganic insulation layers were used in order to reduce the thickness of the system. By this means four layers of electrical conductors can be realized especially for the 2D devices. The smallest diameter of the rotatory motor is 1 mm and could be successfully driven.

 

Keywords: Synchronous micro motors, Rotatory and linear actuators, Micro coils, UV depth lithography, Polymer magnets

 

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