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Special Issue, October 2007, pp.1-9




Nano-Structure or Nano-Systems: Opportunities and Pitfalls



EI/EWI-DIMES, Delft University of Technology

Mekelweg 4, 2628 CD Delft, The Netherlands

E-mail: p.j.french@tudelft.nl




Received: 7 September 2007   /Accepted: 19 September 2007   /Published: 8 October 2007


Abstract: Scaling down has revealed many new effects leading to new devices able to measure faster and more accurately than traditional devices. They also present challenges in terms of connecting to the macro-world and in reliability. In some cases the scaling works against us leading to lower performance. We should also consider reducing the size of the system, through integration and optimization. It is therefore important to consider the benefits of miniaturization for each application and either reduce the size of the structures in the system, or integrate the system to reduce size. This paper discusses the effects of scaling at both a device level and also a system level.


Keywords: Scaling, Microsystems, Smart sensors


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