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Special Issue, October 2007, pp. 42-50




Frequency Domain Modeling of SAW Devices for Aerospace Sensors



1NASA Langley Research Center, Hampton VA, USA, 23681

2Virginia Commonwealth University, Richmond, VA, USA, 23284

2Tel.: (804) 827-0185, fax: (804) 828-4269

E-mail: gmatkins@vcu.edu



Received: 7 September 2007   /Accepted: 19 September 2007   /Published: 8 October 2007


Abstract: New Surface Acoustic Wave (SAW) sensors for integrated vehicle health monitoring of aerospace vehicles are being investigated. SAW technology is low cost, rugged, lightweight, and extremely low power. However, the lack of design tools for MEMS devices in general, and for SAW devices specifically, promoted the development of SAW Device Models that will enable integrated design, simulation, analysis and automatic layout generation. A frequency domain model of the SAW device has been created. The model is primarily first order, but it includes second order effects from triple transit echoes. This paper presents the model and results from the model for a SAW delay line device.


Keywords: Modeling, Simulation, Surface acoustic waves microelectromechanical systems, MEMS


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