Field-effect transistor thermal converters: a promising device for
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W. Guilherme, K. Ihlenfeld, pp. 1-7
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Thermal characterization of a microheater for micromachined gas sensors,
M. Baroncini, P. Placidi, G.C. Cardinali, A. Scorzoni, pp. 8-14
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An experimental technique for the strain measurement of small structures using pattern recognition,
T.-S. Park, D.-C. Baek, S.-B. Lee, pp. 15-22
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Long-term stability of single-crystal silicon microresonators,
M. Koskenvuori, T. Mattila, A. Haara, J. Kiihamaki, I. Tittonen, A. Oja, H. Seppa,
pp. 23-27
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Smart VO2 thin film for protection of sensitive infrared detectors from strong laser radiation,
S. Chen, H. Ma, X. Yi, T. Xiong, H. Wang, C. Ke, pp.28-31
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Source localization based on pointwise concentration measurements,
J. Matthes, L. Groll, H.B. Keller, pp. 32-37
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The impedance-matching design and simulation on high power elctro-acoustical transducer,
Y.-C. Chen, S. Wu, P.-C. Chen, pp. 38-45
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A fine pitch MEMS probe unit for flat panel display as manufacturing MEMS application,
B.-H. Kim, S.-J. Park, K. Chun, D.-I. Cho, W.-K. Park, T.-U. Jun, S.Yun, pp. 46-52
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Flow measurement by a new type vortex flowmeter of dual triangulate bluff body,
J. Peng, X. Fu, Y. Chen, pp. 53-59
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Fabrication of SOI-based nano-gratings for Moire measurement using focused ion beam,
D. Yan, J. Cheng, A. Apsel, pp. 60-66
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Influence of applied load on vacuum wafer bonding at low temperature,
W.B. Yu, C.M. Tan, J. Wei, S.S. Deng, S.M.L. Nai, pp. 67-72
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Fabrication and characteristics of PDA LCD backlight driving circuits using piezoelectric transformer,
L. Hwang, J. Yoo, E. Jang, D. Oh, Y. Jeong, I. Ahn, M. Cho, pp. 73-78
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Ionic liquids as stable solvents for ionic polymer transducers,
M.D. Bennett, D.J. Leo, pp. 79-90
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Microstructure and magnetic properties of Mn-Ir based specular spin valve multilayer with nano oxide layer,
S.Y. Yoon, D.H. Lee, D.M. Jeon, Y.S. Kim, D.H. Yoon, S.J. Suh, pp. 91-95
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Fabrication of piezoelectric AlGaAs microstructures
P. Kumar, L. Li, L. Calhoun, P. Boudreaux, D. DeVoe, pp. 96-103
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Comparison of plasma generation behaviors between a single crystal semiconductor bridge (single-SCB) and a polysilicon semiconductor
bridge (poly-SCB),
M.-I. Park, H.-T. Choo, S.-H. Yoon, C.-O. Park, pp.104-108
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Effect of gradient residual stress on adhesion for a center-anchored circular plate and its underlying substrate,
M.-J. Lin, R. Chen, pp.109-117
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Actuation of resonant MEMS using short pulsed forces,
E. Colinet, J. Juillard, S. Guessab, R. Kielbasa, pp. 118-125
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A novel type of 3-axis lens actuator with tilt compensation for high-density optical disc system,
N. He, W. Jia, D. Yu, L. Huang, M. Gong, pp. 126-132
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Design and fabrication of a sonophoresis device with a flat flextensional transducer for transdermal drug delivery,
H.Y. Zhang, S.H. Yeo, pp.133-139
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Time-temperature profiles of multi-layer actuators,
J. Pritchard, R. Ramesh, C.R. Bowen, pp. 140-145
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Shape change characteristics of polymer hydrogel based on polyacrylic acid/poly(vinyl sulfonic acid) in electric fields,
S.J. Kim, H.I. Kim, S.J. Park, S.I. Kim, pp.146-150
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Surface micromachined thermally driven micropump,
W.I. Jang, C.A. Choi, C.H. Jun, Y.T. Kim, M. Esashi, pp.151-158
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An approach to the coupling effect between torsion and bending for electrostatic torsional micromirrors,
J.-M. Huang, A.Q. Liu, Z.L. Deng, Q.X. Zhang, J. Ahn, A. Asundi, pp. 159-167
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Nonlinear static characteristics of piezoelectric bending actuators under strong applied electric field,
L.Q. Yao, J.G. Zhang, L. Lu, M.O. Lai, pp. 168-175
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Conference Calender,
pp. I
List of conferences,
pp. III-IV
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