A reliable and economically feasible remote sensing system for temperature and relative humidity measurement
Pages 181-185
M. Moghavvemi, K. E. Ng, C. Y. Soo and S. Y. Tan
Abstract
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Determining the in-plane and out-of-plane dynamic response of
microstructures using pulsed dual-mode ultrasonic array
transducers
Pages 186-193
Wen Pin Lai and Weileun Fang
Abstract
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Active stick control using frictional torque compensation
Pages 194-202
Yoonsu Nam and Sung Kyung Hong
Abstract
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Improvements of on-membrane method for thin film thermal conductivity and emissivity measurements
Pages 203-210
A. Jacquot, G. Chen, H. Scherrer, A. Dauscher and B. Lenoir
Abstract
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Surface micromachined AlN thin film 2 GHz resonator for CMOS integration
Pages 211-216
Motoaki Hara, Jan Kuypers, Takashi Abe and Masayoshi Esashi
Abstract
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Pressure mapping sensor with an array of chirped sampled fiber gratings
Pages 217-221
L. Mohanty, S.C. Tjin and N.Q. Ngo
Abstract
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Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications
Pages 222-229
Mir Majid Teymoori and Ebrahim Abbaspour-Sani
Abstract
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Structural design and analysis of micromachined ring-type vibrating sensor of both yaw rate and linear acceleration
Pages 230-240
Jui-Hong Weng, Wei-Hua Chieng and Jenn-Min Lai
Abstract
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A new method for membrane-based gas measurements
Pages 241-251
D. Lazik and H. Geistlinger
Abstract
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Magneto-resonance frequency shift study of Fe-based nanocrystalline powder cores
Pages 252-255
Zhenjie Zhao, Jianzhong Ruan and Xielong Yang
Abstract
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A characterization of thick-film PTC resistors
Pages 256-266
Marko Hrovat, Darko Belavič, Andreja Benčan, Janez Holc and Goran Dražić
Abstract
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Transient capacitance measurement of MEM capacitor
Pages 267-272
Heikki Nieminen, Jari Hyyryläinen, Timo Veijola, Tapani Ryhänen and Vladimir Ermolov
Abstract
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On the optimization of ultra low power front-end interfaces for capacitive sensors
Pages 273-285
W. Bracke, P. Merken, R. Puers and C. Van Hoof
Abstract
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Stress control in masking layers for deep wet micromachining of Pyrex glass
Pages 286-292
Ciprian Iliescu, Jianmin Miao and Francis E. H. Tay
Abstract
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Fabrication of organic PVP doping-based Ba0.5Sr0.5TiO3 thick films on silicon substrates for MEMS applications
Pages 293-300
Zheyao Wang, Jianshe Liu, Tianling Ren and Litian Liu
Abstract
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Piezoresistance behavior of silicone–graphite composites in the proximity of the electric percolation threshold
Pages 301-308
D.T. Beruto, M. Capurro and G. Marro
Abstract
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Interfaces friction effect of sliding contact on nanoindentation test
Pages 309-316
Chingfu Tsou, Changchun Hsu and Weileun Fang
Abstract
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Piezoelectric micro-transformer based on SOI structure
Pages 317-324
Dejan Vasic, Emmanuel Sarraute, François Costa, Patrick Sangouard and Eric Cattan
Abstract
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Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps
Pages 325-330
Bo Li, Quanfang Chen, Dong-Gun Lee, Jason Woolman and Greg P. Carman
Abstract
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Micromachined 2-D scanner for 3-D optical coherence tomography
Pages 331-340
J.T.W. Yeow, V.X.D. Yang, A. Chahwan, M.L. Gordon, B. Qi, I.A. Vitkin, B.C. Wilson and
A.A. Goldenberg
Abstract
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Experimental characterization of polyimide torsional hinges for optical scanner
Pages 341-348
Hiroshi Miyajima, Tomoko Arikawa, Toshiharu Hidaka, Kazunari Tokuda and Kazuya Matsumoto
Abstract
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A new excimer laser micromachining method for axially symmetric 3D microstructures with continuous surface profiles
Pages 349-355
Yung-Chun Lee, Chun-Ming Chen and Chun-Ying Wu
Abstract
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Etching simulation of negative sloped planes at convex mask corners in Si
Pages 356-363
M. Chahoud
Abstract
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Journal : SENSORS AND ACTUATORS A: PHYSICAL