Sensing capability of a PZT-driven cantilever actuator
Pages 1-8
Limei Xu, Shih-Fu Ling, Bei Lu, Hui Li and Hong Hu
Abstract |
Edge technique for the measurement of Brillouin frequency shift in optical fiber sensor
Pages 9-12
Shengpeng Wan, Qian Jun, YongBo Tang, Sailing He, Xingdao He and Yiqing Gao
Abstract
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Miniature wideband ultrasonic transducers to measure compression and shear waves in solid
Pages 13-23
X. Jian, J.P. Weight and K.T.V. Grattan
Abstract
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Micromachined DC contact capacitive switch on low-resistivity silicon substrate
Pages 24-30
A.B. Yu, A.Q. Liu, Q.X. Zhang, A. Alphones and H.M. Hosseini
Abstract
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Room temperature wafer level glass/glass bonding
Pages 31-36
M.M.R. Howlader, Satoru Suehara and Tadatomo Suga
Abstract
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A possible hydrogen sensing method with dual pressure gauges
Pages 37-40
A. Suzuki, A. Kurokawa, H. Nonaka and S. Ichimura
Abstract
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Assay of glucose in urine and drinking water with voltammetric working sensors of infrared photo diode electrode
Pages 41-48
Suw Young Ly and Yun Kym Kim
Abstract
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Optical and structural characterization of ZnO thin films and
fabrication of bulk acoustic wave resonator (BAW) for the realization
of gas sensors by stacking ZnO thin layers fabricated by e-beam
evaporation and rf magnetron sputtering techniques
Pages 49-55
Jean Pierre Atanas, Roy Al Asmar, Antonio Khoury and Alain Foucaran
Abstract
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Giant resistivity change induced by strain in a composite of conducting particles in an elastomer matrix
Pages 56-62
G. Ausanio, A.C. Barone, C. Campana, V. Iannotti, C. Luponio, G.P. Pepe and L. Lanotte
Abstract
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X-probe flow sensor using self-powered active fiber Bragg gratings
Pages 63-68
Charles Jewart, Ben McMillen, Sung Kwon Cho and Kevin P. Chen
Abstract
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A simple, efficient interface circuit for piezoresistive pressure sensors
Pages 69-73
Josep Jordana and Ramon Pallàs-Areny
Abstract
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Uncertainty reduction techniques in microcontroller-based time measurements
Pages 74-79
Ferran Reverter and Ramon Pallàs-Areny
Abstract
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| | Materials and Technology Section |
Dual frequency PECVD silicon nitride for fabrication of CMUTs’ membranes
Pages 80-87
E. Cianci, A. Schina, A. Minotti, S. Quaresima and V. Foglietti
Abstract
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A polymeric paraffin actuated high-pressure micropump
Pages 88-93
Roger Bodén, Marcus Lehto, Urban Simu, Greger Thornell, Klas Hjort and Jan-Åke Schweitz
Abstract
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CFD modeling of an ion-drag micropump
Pages 94-103
J. Darabi and C. Rhodes
Abstract
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Optimal design of micro-force sensor for wire bonding with high acceleration and frequent movement
Pages 104-118
Yuehong Yin, Chunlin Zhou, Shiyi Chen, Hui Hu and Zhongqin Lin
Abstract
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Sensitivity improvement of diaphragm type ultrasonic sensors by complementary piezoelectric polarization
Pages 119-122
Kaoru Yamashita and Masanori Okuyama
Abstract
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Microfabrication of pre-aligned fiber bundle couplers using ultraviolet lithography of SU-8
Pages 123-130
Ren Yang, Steven A. Soper and Wanjun Wang
Abstract
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A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer
Pages 131-138
Takefumi Kanda, Akira Makino, Tomohisa Ono, Koichi Suzumori, Takeshi Morita and Minoru Kuribayashi Kurosawa
Abstract
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Reflective optical sensor for long-range and high-resolution displacements
Pages 139-146
Christine Prelle, Frédéric Lamarque and Philippe Revel
Abstract
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Design parameter characterisation and experimental validation of hydrostatic actuation suitable for MEMS
Pages 147-154
Simon Mutzenich, Thurai Vinay, Dinesh K. Sood and Gary Rosengarten
Abstract
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Design and modeling of a MEMS pico-Newton loading/sensing device
Pages 155-162
B.A. Samuel, A.V. Desai and M.A. Haque
Abstract
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Stability, bifurcation and chaos of a high-speed rub-impact rotor system in MEMS
Pages 163-178
Wen-Ming Zhang and Guang Meng
Abstract
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Micromachining of GaAs structures with an acidic hydrogen peroxide
solution: Experimental and theoretical 3D etching shapes
Pages 179-193
C.R. Tellier, G. Huve and T.G. Leblois
Abstract
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Investigation on silicon–glass electrostatic bonding time
Pages 194-199
Chuai Rongyan, Liu Xiaowei, Chen Weiping, Song Minghao and Liu Yibo
Abstract
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Journal: SENSORS AND ACTUATORS A: PHYSICAL