Fabrication and characterization of ZnO nanowires based UV photodiodes
Pages 201-206
Lei Luo, Yanfeng Zhang, Samuel S. Mao and Liwei Lin Abstract
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An integrated system for on-chip temperature gradient interaction chromatography
Pages 207-215
Chi-Yuan Shih, Yang Chen, Wei Li, Jun Xie, Qing He and Yu-Chong Tai Abstract
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An approach for creating polymeric microstructures with various aspect ratios for cellular analysis applications
Pages 216-220
Yi Zhao and Xin Zhang Abstract
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Experiments and theory of thermally-induced stress relaxation in amorphous dielectric films for MEMS and IC applications
Pages 221-227
Zhiqiang Cao and Xin Zhang Abstract
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Fabrication of three-dimensional microstructures based on singled-layered SU-8 for lab-on-chip applications
Pages 228-234
Hui Yu, Oluwaseyi Balogun, Biao Li, T.W. Murray and Xin Zhang Abstract
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Temperature measurements of microhotplates using fluorescence thermometry
Pages 235-240
C.W. Meyer, D.C. Meier, C.B. Montgomery and S. Semancik Abstract
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Fabrication of integrated nozzle plates for inkjet print head using microinjection process
Pages 241-247
S.C. Shen, C.T. Pan, Y.R. Wang and C.C. Chang Abstract
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Micro vertical comb actuators by selective stiction process
Pages 248-254
Jongbaeg Kim, Dane Christensen and Liwei Lin Abstract
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The continuous spinning current (CSC) stress sensor method for the
extraction of two stress components in an offset compensated
manner
Pages 255-260
J. Bartholomeyczik, M. Doelle, P. Ruther and O. Paul Abstract
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Geometry optimization for planar piezoresistive stress sensors based on the pseudo-Hall effect
Pages 261-269
M. Doelle, D. Mager, P. Ruther and O. Paul Abstract
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Plastic 95-GHz rectangular waveguides by micro molding technologies
Pages 270-275
Firas Sammoura, Yu-Chuan Su, Ying Cai, Chen-Yu Chi, Bala Elamaran, Liwei Lin and
Jung-Chih Chiao Abstract
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Unpowered spiral-tube parylene pressure sensor for intraocular pressure sensing
Pages 276-282
Po-Jui Chen, Damien C. Rodger, Mark S. Humayun and Yu-Chong Tai Abstract
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Computer aided design of an EWOD microdevice
Pages 283-294
J. Berthier, Ph. Clementz, O. Raccurt, D. Jary, P. Claustre, C. Peponnet and Y. Fouillet Abstract
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A shear stress sensor for tactile sensing with the piezoresistive cantilever standing in elastic material
Pages 295-301
Kentaro Noda, Kazunori Hoshino, Kiyoshi Matsumoto and Isao Shimoyama Abstract
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Laterally driven thin film PZT actuator with high-aspect-ratio silicon beam for stroke amplification
Pages 302-309
Young Ho Seo, Doo-Sun Choi, Joon-Hyung Lee, Tae-Jin Je and Kyung-Hyun Whang Abstract
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A design method for out-of-plane structures by multi-step magnetic self-assembly
Pages 310-315
Eiji Iwase and Isao Shimoyama Abstract
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Characterization of KrF excimer laser annealed PECVD SixGe1−x for MEMS post-processing
Pages 316-323
Sherif Sedky, Maria Gromova, Tom Van der Donck, Jean-Pierre Celis and Ann Witvrouw Abstract
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Piezoresistive sensing with twin-beam structures in standard MEMS foundry processes
Pages 325-331
Behraad Bahreyni, Farshid Najafi and Cyrus Shafai Abstract
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Flame imaging using laser-based transmission tomography
Pages 332-339
Elmy Johana Mohamad, Ruzairi Abdul Rahim, Sallehudin Ibrahim, Shaharum Sulaiman and Mohamad Shukri Manaf Abstract
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Calibration of three-dimensional integrated sensors for improved system accuracy
Pages 340-344
Rong Zhu and Zhaoying Zhou Abstract
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A sensitive electromagnetic acoustic transducer for picometer-scale ultrasonic displacement measurements
Pages 345-354
S. Boonsang and R.J. Dewhurst Abstract
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A 2826 MB Metglas ribbon as a strain sensor for remote and dynamic mechanical measurements • ARTICLE
Pages 355-359
Dimitrios Kouzoudis and Dionysios E. Mouzakis Abstract
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The influence of calcium doped ZnO films on Love wave sensor characteristics
Pages 360-365
Walter Water and Yin-Shiang Yang Abstract
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Numerical and analytical study on the pull-in instability of micro-structure under electrostatic loading
Pages 366-380
Yin Zhang and Ya-pu Zhao Abstract
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Stability of surface tension self-assembled 3D MOEMS
Pages 381-391
Y.K. Hong and R.R.A. Syms Abstract
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The evaluation of Young's modulus and residual stress of copper films by microbridge testing
Pages 392-397
Z.M. Zhou, Y. Zhou, C.S. Yang, J.A. Chen, W. Ding and G.F. Ding Abstract
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