A finite element model for bending behaviour of conducting polymer electromechanical actuators
Pages 1-11
Philippe Metz, Gürsel Alici and Geoffrey M. Spinks
SummaryPlus
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Evaporation evolution of volatile liquid droplets in nanoliter wells
Pages 12-19
Chin-Tai Chen, Fan-Gang Tseng and Ching-Chang Chieng
SummaryPlus
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Distortion optimized focusing mirror device with large aperture
Pages 20-27
Ulrich M. Mescheder, Carlos Estañ, Gergoe Somogyi and Markus Freudenreich
SummaryPlus
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Development of a MOEMS sun sensor for space applications
Tobias Böhnke, Marika Edoff and Lars Stenmark
SummaryPlus
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Thin film NiTi microthermostat array
Pages 37-41
Daniel D. Shin, Dong-Gun Lee, Kotekar P. Mohanchandra and Gregory P. Carman
SummaryPlus
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Stability of wafer level vacuum encapsulated single-crystal silicon resonators
Pages 42-47
Ville Kaajakari, Jyrki Kiihamäki, Aarne Oja, Sami Pietikäinen, Ville Kokkala and Heikki Kuisma
SummaryPlus
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Integrating wireless ECG monitoring in textiles
Pages 48-53
Johan Coosemans, Bart Hermans and Robert Puers
SummaryPlus
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Three-dimensional nanosprings for electromechanical sensors
Pages 54-61
D.J. Bell, Y. Sun, L. Zhang, L.X. Dong, B.J. Nelson and D. Grützmacher
SummaryPlus
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Simultaneous thermal conductivity and diffusivity sensing in liquids using a micromachined device
Pages 62-67
J. Kuntner, F. Kohl and B. Jakoby
SummaryPlus
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Micromachined gas inertial sensor based on convection heat transfer
Pages 68-74
Rong Zhu, Henggao Ding, Yan Su and Zhaoying Zhou
SummaryPlus
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Micro force sensor with piezoresistive amorphous carbon strain gauge
Pages 75-82
E. Peiner, A. Tibrewala, R. Bandorf, S. Biehl, H. Lüthje and L. Doering
SummaryPlus
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Parasitic leakage resonance-free HRS MEMS package for microwave and millimeter-wave
Pages 83-90
Yo-Tak Song, Hai-Young Lee and Masayoshi Esashi
SummaryPlus
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The constituent equations of piezoelectric multilayer bending actuators in closed analytical form and experimental results
Pages 91-98
Ruediger G. Ballas, H.F. Schlaak and A.J. Schmid
SummaryPlus
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Fabrication and characteristics of the suppressed sidewall injection magnetotransistor using a CMOS process
Pages 99-104
Youn-Gui Song, Ji-Goo Ryu, Young-Shig Choi and Nam-Ho Kim
SummaryPlus
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A self-excited micro cantilever biosensor actuated by PZT using the mass micro balancing technique
Pages 105-110
Yeolho Lee, Geunbae Lim and Wonkyu Moon
SummaryPlus
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Pyroelectric infrared sensors with fast response time and high sensitivity using epitaxial
Pb(Zr, Ti)O3 films on epitaxial γ-Al2O3/Si substrates
Pages 111-115
Daisuke Akai, Keisuke Hirabayashi, Mikako Yokawa, Kazuaki Sawada,
Yoshiharu Taniguchi, Shinnichi Murashige, Naoto Nakayama, Tetsuya
Yamada, Kensuke Murakami and Makoto Ishida
SummaryPlus
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SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection mode
Pages 116-123
Yoshiyuki Watanabe, Toshiaki Mitsui, Takashi Mineta, Yoshiyuki Matsu and Kazuhiro Okada
SummaryPlus
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Study on the low power consumption of racetrack fluxgate
Pages 124-128
Shibin Liu
SummaryPlus
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A new high-temperature thermal sensor based on large-grain polysilicon on insulator
Pages 129-134
Z.H. Wu, P.T. Lai and Johnny K.O. Sin
SummaryPlus
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A new capacitive displacement sensor with high accuracy and long-range
Pages 135-141
Moojin Kim, Wonkyu Moon, Euisung Yoon and Kwang-Ryeol Lee
SummaryPlus
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Analytical model for the sensitivity of a toroidal fluxgate sensor
Pages 142-146
Lucas Pérez, Irene Lucas, Claudio Aroca, Pedro Sánchez and M. Carmen Sánchez
SummaryPlus
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Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes
Pages 147-154
Philippe Dubois, Samuel Rosset, Sander Koster, Johann Stauffer, Serguei
Mikhaïlov, Massoud Dadras, Nico-F. de Rooij and Herbert Shea
SummaryPlus
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Experiments on aircraft flight parameter detection by on-skin sensors
Pages 155-165
S. Callegari, M. Zagnoni, A. Golfarelli, M. Tartagni, A. Talamelli, P. Proli and A. Rossetti
SummaryPlus
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Micromachined integrated shock protection for MEMS
Pages 166-175
Sang Won Yoon, Navid Yazdi, Noel C. Perkins and Khalil Najafi
SummaryPlus
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A ternary barcode detection system with a pattern-adaptable dual threshold
Pages 176-183
Hiroo Wakaumi and Chikao Nagasawa
SummaryPlus
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PCB racetrack fluxgate sensor with improved temperature stability
Pages 184-188
J. Kubik, L. Pavel and P. Ripka
SummaryPlus
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Electrowetting on superhydrophobic SU-8 patterned surfaces
Pages 189-193
Dale L. Herbertson, Carl R. Evans, Neil J. Shirtcliffe, Glen McHale and Michael I. Newton
SummaryPlus
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Enhanced stability of Ti/Pt micro-heaters using a-SiC:H passivation layers
Pages 194-201
U. Schmid and H. Seidel
SummaryPlus
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Current gain in silicon near infrared optical sensor containing multiple low–high junctions
Pages 202-207
O. Malik, V. Grimalsky, J. De la Hidalga-W and P. Pasos-Canul
SummaryPlus
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Behavior of an optical sensor based on non-ideal silicon capacitors: From amplification to generation
Pages 208-213
O. Malik, V. Grimalsky and J. De la Hidalga-W
SummaryPlus
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Optical feedback system with integrated color sensor on LCD
Pages 214-219
Ki-Chan Lee, Seung-Hwan Moon, Brian Berkeley and Sang-Soo Kim
SummaryPlus
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Compact gate-all-around silicon light modulator for ultra high speed operation
Pages 220-227
K.E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki and A.M. Ionescu
SummaryPlus
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Direct hemoglobin measurement on a centrifugal microfluidic platform for point-of-care diagnostics
Pages 228-233
J. Steigert, M. Grumann, M. Dube, W. Streule, L. Riegger, T. Brenner, P. Koltay, K.
Mittmann, R. Zengerle and J. Ducrée
SummaryPlus
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Design of differential electromagnetic transducer for implantable middle ear hearing device using finite element method
Pages 234-240
Min-Kyu Kim, Young-Ho Yoon, Il-Yong Park and Jin-Ho Cho
SummaryPlus
|
Buckled-type valves integrated by parylene micro-tubes
Pages 241-246
Lung-Jieh Yang, Hsin-Hsiung Wang, Jiun-Min Wang, Kuan-Chun Liu and Kai-Chung Ko
SummaryPlus
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Novel 1-chip FBAR filter for wireless handsets
Pages 247-253
Byeoungju Ha, Insang Song, Yun-Kwon Park, Duck-Hwan Kim, Woonbae Kim, Kuangwoo Nam and James Jungho Pak
SummaryPlus
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Design and fabrication of novel three-dimensional multi-electrode array using SOI wafer
Pages 254-261
Huai-Yuan Chu, Tzu-Ying Kuo, Baowen Chang, Shao-Wei Lu, Chuan-Chin Chiao and Weileun Fang
SummaryPlus
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A high-temperature thermopile fabrication process for thermal flow sensors
Pages 262-266
Rainer Buchner, Christoph Sosna, Marcus Maiwald, Wolfgang Benecke and Walter Lang
SummaryPlus
|
Fabrication of a disposable biochip for measuring percent hemoglobin A1c (%HbA1c)
Pages 267-272
Sang Uk Son, Jee-Hoon Seo, Yo Han Choi and Seung S. Lee
SummaryPlus
|
A 4 μs integration time imager based on CMOS single photon avalanche diode technology
Pages 273-281
Cristiano Niclass, Alexis Rochas, Pierre-André Besse, Radivoje Popovic and Edoardo Charbon
SummaryPlus
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A novel thermal-bubble-based micromachined accelerometer
Pages 282-289
Ke-Min Liao, Rongshun Chen and Bruce C.S. Chou
SummaryPlus
|
A smart node architecture for underwater monitoring of sensor networks
Pages 290-296
L. Magagni, M. Sergio, M. Nicolini, D. Gennaretti, R. Canegallo and R. Guerrieri
SummaryPlus
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High voltage thin film transistors integrated with MEMS
Pages 297-301
Eugene M. Chow, Jeng Ping Lu, Jackson Ho, Chinwen Shih, Dirk De Bruyker, Michel Rosa and Eric Peeters
SummaryPlus
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Development of a low-cost piezoresistive compass on CMOS
Pages 302-311
N. Dumas, L. Latorre and P. Nouet
SummaryPlus
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A sensitive microsystem as biosensor for cell growth monitoring and antibiotic testing
Pages 312-321
E. Spiller, A. Schöll, R. Alexy, K. Kümmerer and G.A. Urban
SummaryPlus
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Simplified circuit modeling and fabrication of intrabody communication devices
Pages 322-330
Keisuke Hachisuka, Yusuke Terauchi, Yoshinori Kishi, Ken Sasaki,
Terunao Hirota, Hiroshi Hosaka, Katsuyuki Fujii, Masaharu Takahashi and
Koichi Ito
SummaryPlus
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| | Materials and Technology Section |
Elimination of stress-induced curvature in microcantilever infrared focal plane arrays
Pages 331-339
Shusen Huang, Biao Li and Xin Zhang
SummaryPlus
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A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators
Pages 340-345
S. Saravanan, E. Berenschot, G. Krijnen and M. Elwenspoek
SummaryPlus
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Thermoelectric microstructures of Bi2Te3/Sb2Te3
for a self-calibrated micro-pyrometer
Pages 346-351
L.M. Goncalves, C. Couto, P. Alpuim, D.M. Rowe and J.H. Correia
SummaryPlus
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Modifying residual stress and stress gradient in LPCVD Si3N4 film with ion implantation
Pages 352-357
Wendian Shi, Haixia Zhang, Guobing Zhang and Zhihong Li
SummaryPlus
|
Fabrication and mechanical characterization of LCVD-deposited carbon micro-springs
Pages 358-364
K.L. Williams, J. Köhler and M. Boman
SummaryPlus
|
Fully integrated ferrite-based inductors for RF ICs
Pages 365-370
C. Yang, F. Liu, T. Ren, L. Liu, H. Feng, A.Z. Wang and H. Long
SummaryPlus
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GaN-on-patterned-silicon (GPS) technique for fabrication of GaN-based MEMS
Pages 371-378
Zhenchuan Yang, Ruonan Wang, Deliang Wang, Baoshun Zhang, Kei May Lau and Kevin J. Chen
SummaryPlus
|
Fabrication and characterization of folded SU-8 suspensions for MEMS applications
Pages 379-386
Daniel Bachmann, Bernd Schöberle, Stéphane Kühne, Yves Leiner and Christofer Hierold
SummaryPlus
|
Fabrication of three-dimensional microstructure using maskless gray-scale lithography
Pages 387-392
Kentaro Totsu, Kenta Fujishiro, Shuji Tanaka and Masayoshi Esashi
SummaryPlus
|
Evaluation of langasite (La3Ga5SiO14) as a material for high temperature microsystems
Pages 393-396
Erik Ansorge, Stefan Schimpf, Soeren Hirsch, Jan Sauerwald, Holger Fritze and Bertram Schmidt
SummaryPlus
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Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate
Pages 397-402
Kazuhiko Kano, Kazuki Arakawa, Yukihiro Takeuchi, Morito Akiyama, Naohiro Ueno and Nobuaki Kawahara
SummaryPlus
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Characterization and strain gradient optimization of PECVD poly-SiGe layers for MEMS applications
Pages 403-410
M. Gromova, A. Mehta, K. Baert and A. Witvrouw
SummaryPlus
|
Micro-thermoelectric devices with ceramic combustors
Pages 411-418
Woosuck Shin, Kazuki Tajima, Yeongsoo Choi, Maiko Nishibori, Noriya Izu, Ichiro Matsubara and Norimitsu Murayama
SummaryPlus
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The mechanical properties of atomic layer deposited alumina for use in micro- and
nano-electromechanical systems
Pages 419-429
Marie K. Tripp, Christoph Stampfer, David C. Miller, Thomas Helbling,
Cari F. Herrmann, Christofer Hierold, Ken Gall, Steven M. George and
Victor M. Bright
SummaryPlus
|
A capillary system with 1 × 4 microflow switches via a micronozzle–diffuser pump and hydrophobic-patch design for continuous
liquid handling
Pages 430-437
Chih-Ming Cheng and Cheng-Hsien Liu
SummaryPlus
|
Permanent magnet planar micro-generators
Pages 438-444
Hynek Raisigel, Orphée Cugat and Jérôme Delamare
SummaryPlus
|
A high performance bidirectional micropump for a novel artificial sphincter system
Pages 445-453
A. Doll, M. Heinrichs, F. Goldschmidtboeing, H.-J. Schrag, U.T. Hopt and P. Woias
SummaryPlus
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A single-crystal silicon micromirror for large bi-directional 2D scanning applications
Pages 454-460
Ankur Jain and Huikai Xie
SummaryPlus
|
Shape memory thin film actuator for holding a fine blood vessel
Pages 461-467
Takashi Sugawara, Ken-ichi Hirota, Masaru Watanabe, Takashi Mineta, Eiji Makino, Satoshi Toh and Takayuki Shibata
SummaryPlus
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MicroXY stages with spider-leg actuators for two-dimensional optical scanning
Pages 468-477
Ho Nam Kwon, Jong-Hyun Lee, Kazuhiro Takahashi and Hiroshi Toshiyoshi
SummaryPlus
|
Micromachined S-band patch antenna with reduced dielectric constant
Pages 478-484
H. Kratz, E. Öjefors and L. Stenmark
SummaryPlus
|
Micromachined thick film piezoelectric ultrasonic transducer array
Pages 485-490
Zhihong Wang, Weiguang Zhu, Jianmin Miao, Hong Zhu, Chen Chao and Ooi Kiang Tan
SummaryPlus
|
A piezoelectric micro-actuator with a three-dimensional structure and its micro-fabrication
Pages 491-496
Peng Gao, Kui Yao, Xiaosong Tang, Xujiang He, Santiranjan Shannigrahi, Yaolong Lou, Jian Zhang and Kanzo Okada
SummaryPlus
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Large displacement parallel plate electrostatic actuator with saturation type characteristic
Pages 497-512
Slava Krylov and Yacov Bernstein
SummaryPlus
|
Initial levitation of an electrostatic bearing system without bias
Pages 513-522
Fengtian Han, Qiuping Wu and Zhongyu Gao
SummaryPlus
|
Micromachined Fourier transform spectrometer on silicon optical bench platform
Pages 523-530
Kyoungsik Yu, Daesung Lee, Uma Krishnamoorthy, Namkyoo Park and Olav Solgaard
SummaryPlus
|
Study on a PZT-actuated diaphragm pump for air supply for micro fuel cells
Pages 531-536
Xing Yang, Zhaoying Zhou, Hyejung Cho and Xiaobing Luo
SummaryPlus
|
Using EWOD (electrowetting-on-dielectric) actuation in a micro conveyor system
Pages 537-544
Ilju Moon and Joonwon Kim
SummaryPlus
|
A lobster-sniffing inspired actuator for manipulation of micro-objects via controlling local fluid
Pages 545-552
Cheng-Hsiang Liu, Chia-Fang Chiang, Chieh Chang and Cheng-Hsien Liu
SummaryPlus
|
Tuning the shape and curvature of micromachined cantilevers using multiple plasma treatments
Pages 553-559
Wang-Shen Su, Sheng-Ta Lee, Cheng-Yu Lin, Ming-Shih Tsai, Ming-Chuen Yip and Weileun Fang
SummaryPlus
|
Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics
(LTCC)
Pages 560-567
Hansu Birol, Thomas Maeder and Peter Ryser
SummaryPlus
|
Corrugated membranes for improved pattern definition with micro/nanostencil lithography
Pages 568-574
Marc A.F. van den Boogaart, Maryna Lishchynska, Lianne M. Doeswijk, James C. Greer and Jürgen Brugger
SummaryPlus
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Fabrication challenges for a complicated micro-flow channel system at low temperature process
Pages 575-582
C.W. Liu, C. Gau, H.S. Ko, C.S. Yang and B.T. Dai
SummaryPlus
|
Meso-scale adhesion testing of integrated micro- and nano-scale structures
Pages 583-587
Michael T. Northen and Kimberly L. Turner
SummaryPlus
|
Process integration of carbon nanotubes into microelectromechanical systems
Pages 588-594
Alain Jungen, Christoph Stampfer, Jochen Hoetzel, Victor M. Bright and Christofer Hierold
SummaryPlus
|
Tuning wettability and getting superhydrophobic surface by controlling
surface roughness with well-designed microstructures
Pages 595-600
Liang Zhu, Yanying Feng, Xiongying Ye and Zhaoying Zhou
SummaryPlus
|
Modeling and fabrication of capillary stop valves for planar microfluidic systems
Pages 601-608
Alain Glière and Cyril Delattre
SummaryPlus
|
Fabrication of pyramid shaped three-dimensional 8 × 8 electrodes for artificial retina
Pages 609-615
Kyo-in Koo, Hum Chung, Youngsuk Yu, Jongmo Seo, Jaehong Park, Jung-Min
Lim, Seung-Joon Paik, Sungil Park, Hyun Min Choi, Myoung-Jun Jeong et al.
SummaryPlus
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A new design of knife-edged AFM probe for chromosome precision manipulating
Pages 616-624
Masato Saito, Kazuhisa Nakagawa, Keiichiro Yamanaka, Yuzuru Takamura, Gen Hashiguchi and Eiichi Tamiya
SummaryPlus
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Selective local synthesis of nanowires on a microreactor chip
Pages 625-632
Wei-Chih Lin, Yao-Joe Yang, Gen-Wen Hsieh, Ching-Hsiang Tsai, Chien-Chen Chen and Chao-Chiun Liang
SummaryPlus
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Journal: SENSORS AND ACTUATORS A: PHYSICAL