Physical Section
Two- and three-dimensional microcoil fabrication process for three-axis magnetic sensors on flexible substrates
Pages 2-7
M. Woytasik, J.-P. Grandchamp, E. Dufour-Gergam, J.-P. Gilles, S. Megherbi, E.
Martincic, H. Mathias and P. Crozat
Abstract
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A mechanical-stress sensitive differential amplifier
Pages 8-13
Vitor Garcia and Fabiano Fruett |
Analysis of offset and noise in CMOS piezoresistive sensors using a magnetometer as a case study
Pages 14-20
N. Dumas, L. Latorre and P. Nouet |
PCB fluxgate current sensor with saturable inductor
Pages 21-24
A. Tipek, T. O’Donnell, A. Connell, P. McCloskey and S.C. O’Mathuna |
RF MEMS dielectric sensitivity to electromagnetic radiation
Pages 25-33
Vasilios George Theonas, Michael Exarchos, George J. Papaioannou and George Konstantinidis |
A dry electrophysiology electrode using CNT arrays
Pages 34-41
Giulio Ruffini, Stephen Dunne, Esteve Farrés, Josep Marco-Pallarés, Chris Ray, Ernest Mendoza, Ravi Silva and Carles Grau |
SOI rate gyro sensor for automotive control
Pages 42-46
Y. Nonomura, M. Fujiyoshi, Y. Omura, N. Fujitsuka, K. Mizuno and K. Tsukada |
5.7 GHz on-chip antenna/RF CMOS transceiver for wireless sensor networks
Pages 47-51
J.P. Carmo, P.M. Mendes, C. Couto and J.H. Correia |
On–off magnetoresistive sensor based on screen-printed La2/3Sr1/3MnO3 manganite
Pages 52-55
D. Rubi, J. Fontcuberta, M. Lacaba, A.M. González, J. Baztán, A. Calleja, Ll. Aragonés,
X.G. Capdevila and M. Segarra |
New cost-effective sensor for the characterization of automotive headlamps by measurements in the near field
Pages 56-62
S. Royo, M.J. Arranz, J. Arasa, M. Cattoen and T. Bosch |
Advantages and limitations of cymbals for sensor and actuator applications
Pages 63-69
P. Ochoa, J.L. Pons, M. Villegas and J.F. Fernandez |
Multi-functional probe for small-scale simultaneous measurements of
soil thermal properties, water content, and electrical conductivity
Pages 70-77
A. Valente, R. Morais, A. Tuli, J.W. Hopmans and G.J. Kluitenberg |
Experimental and finite-element study of convective accelerometer on CMOS
Pages 78-84
A. Chaehoi, F. Mailly, L. Latorre and P. Nouet |
Influence of the anisotropy axis direction and ribbon geometry on the giant magnetoimpedance of Metglas® 2705M
Pages 85-89
C.S. Franco, G.P. Ribas and A.C. Bruno |
Fluxgate magnetic sensor and front-end circuitry in an integrated microsystem
Pages 90-97
A. Baschirotto, F. Borghetti, E. Dallago, P. Malcovati, M. Marchesi, E.
Melissano, P. Siciliano and G. Venchi |
Electron permeable membranes for MEMS electron sources
Pages 98-103
F. Haase, P. Detemple, S. Schmitt, A. Lendle, O. Haverbeck, T. Doll, D. Gnieser, H. Bosse and G. Frase |
AeroMEMS sensor array for high-resolution wall pressure measurements
Pages 104-111
A. Berns, U. Buder, E. Obermeier, A. Wolter and A. Leder |
A new position sensor based on the MDL technique
Pages 112-121
E. Hristoforou, P.D. Dimitropoulos and J. Petrou |
Constant-phase element identification in conductivity sensors using a single square wave
Pages 122-128
Javier Lario-García and Ramon Pallŕs-Areny
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An uncooled infrared focal plane array for low-cost applications fabricated with standard CMOS technology
Pages 129-138
C. Calaza, N. Viarani, G. Pedretti, M. Gottardi, A. Simoni, V. Zanini and M. Zen |
MEMS based digital variable capacitors with a high-k dielectric insulator
Pages 139-146
J.K. Luo, M. Lin, Y.Q. Fu, L. Wang, A.J. Flewitt, S.M. Spearing, N.A. Fleck and
W.I. Milne |
A thermal convective accelerometer system based on a silicon sensor—Study and packaging
Pages 147-153
G. Kaltsas, D. Goustouridis and A.G. Nassiopoulou |
System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection
Pages 154-164
María Villarroya, Jaume Verd, Jordi Teva, Gabriel Abadal, Esko Forsen,
Francesc Pérez Murano, Arantxa Uranga, Eduard Figueras, Josep Montserrat, Jaume Esteve et al. |
Novel analog magnetic angle sensor with linear output
Pages 165-170
C. Schott, R. Racz and S. Huber |
A low-cost rate-grade nickel microgyroscope
Pages 171-181
Said Emre Alper, Kanber Mithat Silay and Tayfun Akin |
Effects of gas type on the sensitivity and transition pressure of integrated thermal flow sensors
Pages 182-187
P. Bruschi, M. Piotto and G. Barillaro |
Measurement and modeling of pulsed mode flow meter for liquids based on a single chip probe
Pages 188-194
P. Bruschi, N. Nizza and M. Piotto |
Fast dew point hygrometer with silicon integrated detector—Optimization of dynamic properties
Pages 195-198
J. Weremczuk, G. Tarapata, D. Paczesny and R. Jachowicz |
PVB, PVAc and PS pressure sensors with interdigitated electrodes
Pages 199-206
K. Arshak, D. Morris, A. Arshak, O. Korostynska and E. Moore |
High-resolution pressure sensor for photo acoustic gas detection
Pages 207-213
K. Schjřlberg-Henriksen, D.T. Wang, H. Rogne, A. Ferber, A. Vogl, S. Moe, R. Bernstein, D.
Lapadatu, K. Sandven and S. Brida |
Application of fluxgate gradiometer in magnetopneumography
Pages 214-217
Jiří Tomek, Antonín Platil, Pavel Ripka and Petr Kaspar |
Colour filtering in a-SiC:H based p-i-n-p-i-n cells: A trade-off between bias polarity and absorption regions
Pages 218-223
M. Vieira, A. Fantoni, P. Louro, M. Fernandes, J. Martins, R. Schwarz, G. Lavareda and
C.N. Carvalho |
On the design of GaAs (hhl) resonant cantilevers: Study of
piezoelectric excitation, of piezoresistive sensing and of
micromachined structure
Pages 224-235
C.R Tellier and T.G. Leblois |
Noise spectrum of pulse excited fluxgate sensor
Pages 236-240
Jan Kubik and Pavel Ripka |
Lithium tantalate layer guided plate mode sensors
Pages 241-244
C.R. Evans, S.M. Stanley, C.J. Percival, G. McHale and M.I. Newton |
Effects of the elastic cover on tactile sensor arrays
Pages 245-251
Gábor Vásárhelyi, Mária Ádám, Éva Vázsonyi, István Bársony and Csaba Dücső
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Integrated circuit interface for metal oxide chemical sensor arrays
Pages 252-257
P. Robogiannakis, S. Chatzandroulis and C. Tsamis
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Analog and digital implementation of an accurate phasemeter for laser range finding
Pages 258-264
C. Baud, H. Tap-Béteille, M. Lescure and J.-P. Béteille |
Digital sensors design based on universal frequency sensors interfacing IC
Pages 265-270
Sergey Y. Yurish |
| Materials & Technology Section |
Piezoelectric driven resonant beam array in langasite (La3Ga5SiO14)
Pages 271-277
Erik Ansorge, Stefan Schimpf, Soeren Hirsch, Jan Sauerwald, Holger Fritze and Bertram Schmidt |
Optical and electrical properties of silicon rich oxide films for optical sensors
Pages 278-282
A. Luna-López, M. Aceves-Mijares and O. Malik |
Amorphous metal alloy based MEMS for RF applications
Pages 283-288
Mari Ylönen, Tauno Vähä-Heikkilä and Hannu Kattelus |
A measurement technique for thermoelectric power of CMOS layers at the wafer level
Pages 289-295
Fulvio Mancarella, Alberto Roncaglia and Gian Carlo Cardinali |
A laser release method for producing prototype flexible retinal implant devices
Pages 296-301
N. MacCarthy, T. Wood, H. Ameri, D. O’Connell and J. Alderman |
Appropriate charge control of the storage capacitor in a piezoelectric energy harvesting device for discontinuous load operation
Pages 302-310
Loreto Mateu and Francesc Moll |
A multilayer thick-film PZT actuator for MEMs applications
Pages 311-316
N.R. Harris, M. Hill, R. Torah, R. Townsend, S. Beeby, N.M. White and J. Ding |
Micro-hotplates on polyimide for sensors and actuators
Pages 317-324
D. Briand, S. Colin, A. Gangadharaiah, E. Vela, P. Dubois, L. Thiery and N.F. de Rooij |
Coin-size coiled-up polymer foil thermoelectric power generator for wearable electronics
Pages 325-330
J. Weber, K. Potje-Kamloth, F. Haase, P. Detemple, F. Völklein and T. Doll
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Chip integrated fuel cell
Pages 331-336
Gilbert Erdler, Mirko Frank, Mirko Lehmann, Holger Reinecke and Claas Müller |
Optimization and fabrication of thick flexible polymer based micro thermoelectric generator
Pages 337-345
Wulf Glatz, Simon Muntwyler and Christofer Hierold |
Modelling and fabrication of low operation temperature microcages with a
polymer/metal/DLC trilayer structure
Pages 346-353
J.K. Luo, R. Huang, J.H. He, Y.Q. Fu, A.J. Flewitt, S.M. Spearing, N.A. Fleck and
W.I. Milne |
| Systems Applications Section |
Concept study of an implantable microsystem for electrical resistance
and temperature measurements in dairy cows, suitable for estrus
detection
Pages 354-361
Raul Morais, A. Valente, J.C. Almeida, Amélia M. Silva, Salviano Soares,
M.J.C.S. Reis, R. Valentim and Jorge Azevedo |
25 mm sensor–actuator layer: A miniature, highly adaptable interface layer
Pages 362-369
J. Barton, G. Hynes, B. O’Flynn, K. Aherne, A. Norman and A. Morrissey |
Applying autonomous sensor systems in logistics—Combining sensor networks, RFIDs and software agents
Pages 370-375
Reiner Jedermann, Christian Behrens, Detmar Westphal and Walter Lang |
A low loss flexural plate wave (FPW) device through enhanced properties
of sol–gel PZT (52/48) thin film and stable TiN-Pt bottom electrode
Pages 376-384
Praveen Kumar Sekhar, Sriram Akella and Shekhar Bhansali |
An ultrasonic welding based process for building up a new class of inert fluidic microsensors and -actuators from polymers
Pages 385-392
Roman Truckenmüller, Ralf Ahrens, Yue Cheng, Günther Fischer and Volker Saile |
Reactive ion etching for bulk structuring of polyimide
Pages 393-399
U. Buder, J.-P. von Klitzing and E. Obermeier |
Development of process for far infrared sensor fabrication
Pages 400-406
Roberto R. Neli, Ioshiaki Doi, José A. Diniz and Jacobus W. Swart |
Determination of the adhesion energy of MEMS structures by applying Weibull-type distribution function
Pages 407-414
Daniel Bachmann, Stéphane Kühne and Christofer Hierold |
Flip-chip packaging of piezoresistive pressure sensors
Pages 415-419
Francesca Campabadal, Josep Lluís Carreras and Enric Cabruja
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