ISSN: 0924-4247  Vol.134, Issue 2


Date: 15 March 2007


 General Section
Detection of two parameters in the liquid by means of multifunctional sensing method using a pair of piezoelectric ceramics
Pages 297-302
Akira Kimoto and Katsunori Shida
 Physical Section
Flow meter for high-purity and aggressive liquids
Pages 303-309
M. Neuhaus, H. Looser, H. Burtscher, D. Schrag, J. Hahn and R. Schoeb
Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements
Pages 310-320
Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama and Susumu Sugiyama
Hydrodynamic fabrication and characterization of a pH-responsive microscale spherical actuating element
Pages 321-328
DuckJoong Kim, SungRak Kim, JiYoung Park, JuYeoul Baek, SeonJeong Kim, Kyung Sun, TaeSoo Lee and SangHoon Lee
Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage
Pages 329-333
Hyo-Jin Nam, Young-Sik Kim, Caroline Sunyong Lee, Won-Hyeog Jin, Seong-Soo Jang, Il-Joo Cho, Jong-Uk Bu, Woo Beom Choi and Seung Woo Choi
Fabrication of a millinewton force sensor using low temperature co-fired ceramic (LTCC) technology
Pages 334-338
Hansu Birol, Thomas Maeder, Ingo Nadzeyka, Marc Boers and Peter Ryser
Magneto-optical phase modulation in integrated Mach–Zehnder interferometric sensors
Pages 339-347
B. Sepúlveda, G. Armelles and L.M. Lechuga
Characterization of Yb2O3 based optical temperature sensor for high temperature applications
Pages 348-356
Ayan Bhattacharya, R. Srinivasa Rao and M. Ghanashyam Krishna
A new modeling and validation of two-axis miniature fine sun sensor
Pages 357-365
Young-Keun Chang, Mi-Yeon Yun and Byung-Hoon Lee
A Linear optical sensor for measuring needle displacement in common-rail diesel injectors
Pages 366-373
Marco Coppo, Claudio Dongiovanni and Claudio Negri
Compensation of the anisotropic behavior of single crystalline silicon in a 3D tactile sensor
Pages 374-381
E.J.C. Bos, R.W.P. Heldens, F.L.M. Delbressine, P.H.J. Schellekens and A. Dietzel
An implantable capacitive pressure sensor for biomedical applications
Pages 382-388
Chia-Chu Chiang, Chou-Ching K. Lin and Ming-Shuang Ju
Accurate high-resolution fiber-optic distributed strain measurements for structural health monitoring
Pages 389-395
Romeo Bernini, Aldo Minardo and Luigi Zeni
Low-cost DC electric field sensor
Pages 396-398
Ben-Zion Kaplan, Vladimir Boroda and Uri Suissa
A novel method to measure the movement interferences for multi-axis lens actuator in optical disc system
Pages 399-404
Lei Huang, Mali Gong, Ping Yan and Qiang Liu
Design of integrated wavelength monitor based on a Y-branch with an S-bend waveguide
Pages 405-409
Qian Wang, Gerald Farrell, Pengfei Wang, Ginu Rajan and Thomas Freir
Frequency-domain displacement sensing with a fiber ring-resonator containing a variable gap
Pages 410-413
Frank Vollmer and Peer Fischer
On the response of a resonating plate in a liquid near a solid wall
Pages 414-426
Christopher Harrison, Emmanuel Tavernier, Olivier Vancauwenberghe, Eric Donzier, Kai Hsu, Anthony R.H. Goodwin, Frederic Marty and Bruno Mercier
PVDF corrugated transducer for ultrasonic ranging sensor
Pages 427-435
Minoru Toda and Jerry Dahl
Unified mechanical approach to piezoelectric bender modeling
Pages 436-446
Robert Dunsch and Jean-Marc Breguet
 Materials and Technology Section
Effect of doping level and spray time on zinc oxide thin films produced by spray pyrolysis for transparent electrodes applications
Pages 447-451
Z. Ben Achour, T. Ktari, B. Ouertani, O. Touayar, B. Bessais and J. Ben Brahim
The characteristics of low-temperature sintered PbTiO3 based ceramics and its applications
Pages 452-456
Te-Yi Chen, Sheng-Yuan Chu, Ren-Chuan Chang, Chih-Kao Cheng, Cheng-Shong Hong and Hsiau-Hsian Nien
Polymer MEMS processing for multi-user applications
Pages 457-464
Dan Sameoto, See-Ho Tsang and M. Parameswaran
Effect of magnesium in KOH solution on the anisotropic wet etching of silicon
Pages 465-470
Hiroshi Tanaka, Di Cheng, Mitsuhiro Shikida and Kazuo Sato
 Actuator Section
Actuation potentials and capillary forces in electrowetting based microsystems
Pages 471-479
Jean Berthier, Philippe Dubois, Philippe Clementz, Patricia Claustre, Christine Peponnet and Yves Fouillet
Transverse 1-3 piezoelectric ceramic/polymer composite with multi-layered PZT ceramic blocks
Pages 480-485
Chang-Bun Yoon, Sung-Mi Lee, Seung-Ho Lee, Hyoun-Ee Kim and Kyung-Woo Lee
3D droplet displacement in microfluidic systems by electrostatic actuation
Pages 486-493
Jean-Maxime Roux, Yves Fouillet and Jean-Luc Achard
Mechanical behavior of an acrylic elastomer used in dielectric elastomer actuators
Pages 494-504
Michael Wissler and Edoardo Mazza
Electro-mechanical equivalent circuit of a piezoelectric ceramic thin circular ring in radial vibration
Pages 505-512
Shuyu Lin
Novel microstepping control methods for electromagnetic micromotors with star-connected winding
Pages 513-518
Zhenbo Li, Jiapin Chen, Xiang Ge and Chen Zhang
Windmill-type ultrasonic micromotor fabricated by thermoplastic green machining process
Pages 519-524
Chang-Bun Yoon, Sung-Mi Lee, Hyoun-Ee Kim and Kyung-Woo Lee
A large-active-area light-blocking based switch for people with disability
Pages 525-531
Sarun Sumriddetchkajorn and Ratthasart Amarit
Preparing of a high speed bistable electromagnetic RF MEMS switch
Pages 532-537
Yong-hua Zhang, Guifu Ding, Xiaofeng Shun, Donghua Gu, Bingchu Cai and Zongsheng Lai
Influence of target design on the damage threshold for optically powered MEMS thermal actuators
Pages 538-543
Leslie M. Phinney and Justin R. Serrano
Domain reorientation of piezoelectric bending actuators
Pages 544-554
Tao Li, Y.H. Chen, F.Y.C. Boey and J. Ma
Review of MEMS-based drug delivery and dosing systems
Pages 555-564
Nan-Chyuan Tsai and Chung-Yang Sue
Contactless suspension and transportation of glass panels by electrostatic forces
Pages 565-574
Jong Up Jeon, Kyu-Yeol Park and Toshiro Higuchi
Wafer-scale fabrication of infrared detectors based on tunneling displacement transducers
Pages 575-581
Olaleye Ajakaiye, John Grade, Choongsoo Shin and Thomas Kenny
Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators
Pages 582-593
Zhili Hao and Farrokh Ayazi
Frequency dependent fluid damping of micro/nano flexural resonators: Experiment, model and analysis
Pages 594-599
Weibin Zhang and Kimberly Turner
Influence of metal stress on RF MEMS capacitive switches
Pages 600-605
Richard E. Strawser, Kevin D. Leedy, Rebecca Cortez, John L. Ebel, Steven R. Dooley, Cari F. Herrmann Abell and Victor M. Bright
Systems/Applications Section
A high performance planar pump using electro-conjugate fluid with improved electrode patterns
Pages 606-614
Woo-Suk Seo, Kazuhiro Yoshida, Shinichi Yokota and Kazuya Edamura
Group sensor method with statistics
Pages 615-621
Kiyohisa Nishiyama, Mike C.L. Ward and Raya Khalil AL-Dadah
Methodology of evaluating safety in automobiles using intelligent sensor architecture and neural networks
Pages 622-630
Alberto Rovetta, Chiara Zocchi, Alessandro Giusti, Alessandro Adami and Francesco Scaramellini
Fabrication of gapless triangular micro-lens array
Pages 631-640
C.T. Pan and C.H. Su
The study of event recognition technology of ticket gate in urban railway traffic
Pages 641-649
Qu Ri, Bao Yan-ru and Ren Chang-ming
 Technology Section
Induction electrohydrodynamics micropump for high heat flux cooling
Pages 650-659
Vishal Singhal and Suresh V. Garimella
Design of low-temperature CMOS-process compatible membrane fabricated with sacrificial aluminum layer for thermally isolated applications
Pages 660-667
Kow-Ming Chang, Ren-Jie Lin and I-Chung Deng







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