ISSN: 0924-4247  Vol.136, Issue 2


Micromechanics Section of Sensors and Actuators, Based on Contributions revised from the Technical Digest

of the 2006 Solid-State Sensor, Actuator and Microsytems Workshop


Date: 16 May 2007


Adaptation of myofibrils to a microstructured polymeric substrate
Pages 491-495
Yi Zhao and Xin Zhang
Dynamic characterization of a linear electrostatic micromotor supported on microball bearings
Pages 496-503
Nima Ghalichechian, Alireza Modafe, Jeffrey H Lang and Reza Ghodssi
A novel impedance assay for cardiac myocyte hypertrophy sensing
Pages 504-509
Mo Yang and Xin Zhang
Carbon nanotube micropatterns and cantilever arrays fabricated with layer-by-layer nano self-assembly
Pages 510-517
Wei Xue and Tianhong Cui
Functionalized nano interdigitated electrodes arrays on polymer with integrated microfluidics for direct bio-affinity sensing using impedimetric measurement
Pages 518-526
Zhiwei Zou, Junhai Kai, Michael J. Rust, Jungyoup Han and Chong H. Ahn
High-κ dielectrically transduced MEMS thickness shear mode resonators and tunable channel-select RF filters
Pages 527-539
Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow and Sunil A. Bhave
Acetylcholine biosensors based on layer-by-layer self-assembled polymer/nanoparticle ion-sensitive field-effect transistors
Pages 540-545
Yi Liu, Arthur G. Erdman and Tianhong Cui
Fabrication of tapered SU-8 structure and effect of sidewall angle for a variable focus microlens using EWOD
Pages 546-553
Yuan-Jen Chang, Kamran Mohseni and Victor M. Bright
ArF excimer laser micromachining of Pyrex, SiC and PZT for rapid prototyping of MEMS components
Pages 554-563
Jean-Philippe Desbiens and Patrice Masson
 General Section
 LetterTo the Editor
Femto-Newton force sensitivity quartz tuning fork sensor
Pages 564-566
Mladen Barbic, Lowell Eliason and James Ranshaw
Displacement self-sensing align-free He–Ne laser based on hollow cube corner prism folding cavity
Pages 567-571
Yidong Tan, Shulian Zhang and Jing Hua Liu
 Heading: Physical Section
Dynamic response measurement of offshore platform model by FBG sensors
Pages 572-579
Li Sun, Hong-Nan Li, Liang Ren and Qiao Jin
Theoretical and experimental study on the optical fiber bundle displacement sensors
Pages 580-587
Huimin Cao, Youping Chen, Zude Zhou and Gang Zhang
High gain bipolar junction phototransistors with finger-shaped emitter for improved optical gas sensing in the blue spectral region
Pages 588-596
Arianna Tibuzzi, Gian-Franco Dalla Betta, Claudio Piemonte, Corrado Di Natale, Arnaldo D’Amico and Giovanni Soncini
Surface potential imaging in oxide-nitride-oxide-silicon structure using a field effect transistor cantilever
Pages 597-603
M.S. Suh, C.S. Lee, S.H. Kim, K.I. Lee, J.W. Cho, Y. Kuk and J.K. Shin
 Heading: Materials and Technology Section
Effect of doping of organic and inorganic acids on polyaniline/Mn3O4 composite for NTC and conductivity behaviour
Pages 604-612
M.L. Singla, Sajeela Awasthi, Alok Srivastava and D.V.S. Jain
A study of electrical properties and microstructure of nitrogen-doped poly-SiC films deposited by LPCVD
Pages 613-617
Sangsoo Noh, Xiaoan Fu, Li Chen and Mehran Mehregany
Evaluation of the constitutive material parameters for the numerical modelling of structures with lead–zirconate–titanate thick films
Pages 618-628
Marina Santo Zarnik, Darko Belavic and Srecko Macek
 Actuator Section
Concept of a micro finger using electro-conjugate fluid and fabrication of a large model prototype
Pages 629-637
Ryutaro Abe, Kenjiro Takemura, Kazuya Edamura and Shinichi Yokota
Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS
Pages 638-645
Gianluca Piazza and Albert P. Pisano
Investigation of the pressure probe properties as the sensor in the vortex flowmeter
Pages 646-655
Zhiqiang Sun, Hongjian Zhang and Jiemin Zhou
A self-sensing ion conducting polymer metal composite (IPMC) actuator
Pages 656-664
Andres Punning, Maarja Kruusmaa and Alvo Aabloo
Simulation and experiments for a phase-change actuator with bistable membrane
Pages 665-672
Gwi-Eun Song, Kwang-Ho Kim and Yoon-Pyo Lee
An analytical model and working equations for static deflections of a circular multi-layered diaphragm-type piezoelectric actuator
Pages 673-689
Mandar Deshpande and Laxman Saggere
The MEMS pulsed digital oscillator (PDO) below the Nyquist limit
Pages 690-696
M. Domínguez, J. Pons, J. Ricart and E. Figueras
A large-displacement CMOS micromachined thermal actuator with comb electrodes for capacitive sensing
Pages 697-703
Li-Sheng Zheng and Michael S.-C. Lu
Several key issues in developing of cylinder type 3-DOF ultrasonic motor
Pages 704-709
Zhirong Li, Chunsheng Zhao, Weiqing Huang and Zhao-Liang Li
 Heading: Micromechanics Section
Sacrificial layer etching in bubble structure
Pages 710-716
Changju Wu, Huilian Ma, Zhonghe Jin and Yuelin Wang
Deflection of microcantilever by growing vapor bubble
Pages 717-722
Heon Ju Lee, Young Soo Chang, Yoon Pyo Lee, Kwang-Hun Jeong and Ho-Young Kim
 Systems/Applications Section
Improvement of flow and pressure controls in diffusion-tube humidity generator: Performance evaluation of trace-moisture generation using cavity ring-down spectroscopy
Pages 723-729
Hisashi Abe and Hiroshi Kitano
Internal model control for shape memory alloy actuators using fuzzy based Preisach model
Pages 730-741
Kyoung Kwan Ahn and Nguyen Bao Kha
Osmotic dispense pump for operation at different temperatures and pressures
Pages 742-748
Trent Deem, Phillip M. Ligrani, Dan Tower and John Connelly







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