ISSN: 0924-4247  Vol.139, Issue 1-2


Selected Papers From the Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006)

Singapore, 25-28 June 2006

Edited by Paddy French and Ai-Qun-Liu


Date: 12 September 2007



Physical Section
Optimal design on SAW sensor for wireless pressure measurement based on reflective delay line
Pages 2-6
Wen Wang, Keekeun Lee, Insang Woo, Ikmo Park and Sangsik Yang
Preparation of tungsten oxide–tin oxide nanocomposites and their ethylene sensing characteristics
Pages 7-11
Yootana Pimtong-Ngam, Sirithan Jiemsirilers and Sitthisuntorn Supothina
Thermal analysis of micro cantilevers integrated with heaters for low power nano-data-storage application
Pages 12-16
Caroline Sun-Yong Lee, Sung-Geun Kim, Suk-Yong Jeong, Sung-Hoon Ahn, Won-Hyeog Jin, Sung-Soo Jang, Il-Joo Cho, Young-Sik Kim and Hyo-Jin Nam
Low cost thin film based piezoresistive MEMS tactile sensor
Pages 17-22
A. Wisitsoraat, V. Patthanasetakul, T. Lomas and A. Tuantranont
An optimized MEMS-based electrolytic tilt sensor
Pages 23-30
Ho Jung, Chang Jin Kim and Seong Ho Kong
Detecting boundary-layer separation point with a micro shear stress sensor array
Pages 31-35
Kui Liu, Weizheng Yuan, Jinjun Deng, Binghe Ma and Chengyu Jiang
3D arrays of SERS substrate for ultrasensitive molecular detection
Pages 36-41
R.Z. Tan, A. Agarwal, N. Balasubramanian, D.L. Kwong, Y. Jiang, E. Widjaja and M. Garland
A GaAs acoustic sensor with frequency output based on resonant tunneling diodes
Pages 42-46
Binzhen Zhang, Jian Wang, Chenyang Xue, Wendong Zhang and Jijun Xiong
Mechanical tuning of two-dimensional photonic crystal cavity by micro Electro mechanical flexures
Pages 47-52
O. Levy, B.Z. Steinberg, A. Boag, S. Krylov and I. Goldfarb
Doped and dedoped polyaniline nanofiber based conductometric hydrogen gas sensors
Pages 53-57
A.Z. Sadek, W. Wlodarski, K. Kalantar-Zadeh, C. Baker and R.B. Kaner
Function-inspection scheme for an injured peripheral nerve using a polymer based microelectrode array
Pages 58-65
Yong-Ho Kim, Chungkeun Lee, Kang Min Ahn, Yong-Jun Kim and Myoungho Lee
Finite element analysis of ring strain sensor
Pages 66-69
B. Chen, X. Wu and X. Peng
On the micromechanics of micro-cantilever sensors: Property analysis and eigenstrain modeling
Pages 70-77
Alexander M. Korsunsky, Suman Cherian, Roberto Raiteri and Rüdiger Berger
Experimental investigation and visualization on capillary and boiling limits of micro-grooves made by different processes
Pages 78-87
Shao-Wen Chen, Jui-Ching Hsieh, Cheng-Tai Chou, Hung-Hui Lin, Sheng-Chih Shen and Ming-Jye Tsai
Surface micromachined accelerometer using ferroelectric substrate
Pages 88-94
Seiji Aoyagi, Sho Kumagai, Daiichiro Yoshikawa and Yuichi Isono
Flapping wings with PVDF sensors to modify the aerodynamic forces of a micro aerial vehicle
Pages 95-103
Lung-Jieh Yang, Cheng-Kuei Hsu, Jen-Yang Ho and Chao-Kang Feng
Short-circuit measurement by Seebeck current detection of a single thermocouple and its application
Pages 104-110
Seung Seoup Lee and Mitsuteru Kimura
Planar type micromachined probe with low uncertainty at low frequencies
Pages 111-117
Jung-Mu Kim, Sungjoon Cho, Namgon Kim, Jeonghoon Yoon, Jeiwon Cho, Changyul Cheon, Youngwoo Kwon and Yong-Kweon Kim
Diaphragm deflection control of piezoelectric ultrasonic microsensors for sensitivity improvement
Pages 118-123
Kaoru Yamashita, Hiroki Nishimoto and Masanori Okuyama
Production of protein microarrays for cell culture using electrostatic deposition
Pages 124-130
Hyuneui Lim, Dongsoo Kim, Wonhee Lee, Yongdoo Park and Kyuback Lee
Olfactory and taste cell sensor and its applications in biomedicine
Pages 131-138
Ping Wang, Qingjun Liu, Ying Xu, Hua Cai and Yan Li
DNA purification silicon chip
Pages 139-144
Hong Miao Ji, Victor Samper, Yu Chen, Wing Cheong Hui, Hui Jen Lye, Fatimah Bte Mustafa, Ai Cheng Lee, Lin Cong, Chew Kiat Heng and Tit Meng Lim
 Materials and Technology Section
Anti-adhesive effects of diverse self-assembled monolayers in nanoimprint lithography
Pages 145-151
Chih-Wei Wu, Yung-Kang Shen, Sheng-Yu Chuang and C.S. Wei
Preparation and characterization of wafer scale lead zirconate titanate film for MEMS application
Pages 152-157
Jian Lu, Yi Zhang, Takeshi Kobayashi, Ryutaro Maeda and Takashi Mihara
Ferroelectric poly(vinylidene fluoride-hexafluoropropylene) thin films on silicon substrates
Pages 158-161
Xujiang He, Kui Yao and Bee Keen Gan
Actuator Section
Glass-based microfluidic device fabricated by parylene wafer-to-wafer bonding for impedance spectroscopy
Pages 162-171
Daniel P. Poenar, Ciprian Iliescu, Mihaela Carp, Ah Ju Pang and Kwong Joo Leck
A circular microchannel integrated with embedded sprial electrodes used for fluid transportation
Pages 172-177
Lung-Jieh Yang, Jiun-Min Wang, Kai-Chung Ko, Wen-Pin Shih and Ching-Liang Dai
Thermomechanical tensile characterization of Ti–Ni shape memory alloy films for design of MEMS actuator
Pages 178-186
Takahiro Namazu, Akinobu Hashizume and Shozo Inoue
A 5.8-GHz VCO with CMOS-compatible MEMS inductors
Pages 187-193
Sheng-Hsiang Tseng, Ying-Jui Hung, Ying-Zong Juang and Michael S.-C. Lu
A novel electromagnetic elastomer membrane actuator with a semi-embedded coil
Pages 194-202
Hung-Lin Yin, Yu-Che Huang, Weileun Fang and Jerwei Hsieh
A novel artificial sphincter prosthesis driven by a four-membrane silicon micropump
Pages 203-209
Alexander F. Doll, Martin Wischke, Andreas Geipel, Frank Goldschmidtboeing, Olaf Ruthmann, Ulrich T. Hopt, Hans-Juergen Schrag and Peter Woias
A novel constant delivery thermopneumatic micropump using surface tensions
Pages 210-215
Do Han Jun, Woo Young Sim and Sang Sik Yang
A novel polydimethylsiloxane microfluidic system including thermopneumatic-actuated micropump and Paraffin-actuated microvalve
Pages 216-220
Jong-Chul Yoo, Y.J. Choi, C.J. Kang and Yong-Sang Kim
Joule heating and its effects on electrokinetic transport of solutes in rectangular microchannels
Pages 221-232
Gongyue Tang, Deguang Yan, Chun Yang, Haiqing Gong, Cheekiong Chai and Yeecheong Lam
 Micromechanics Section
An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors
Pages 233-236
Hiroaki Yamazaki, Tamio Ikehashi, Tatsuya Ohguro, Etsuji Ogawa, Kenji Kojima, Kazunari Ishimaru and Hidemi Ishiuchi
 Systems/Applications Section
Experimental study of flow characteristics and mixing performance in a PZT self-pumping micromixer
Pages 237-244
H.J. Sheen, C.J. Hsu, T.H. Wu, H.C. Chu, C.C. Chang and U. Lei
The 2.4 GHz biotelemetry chip for healthcare monitoring system
Pages 245-251
Chen-Ming Hsu, Wei-Yin Liao, Ching-Hsing Luo and Tse-Chuan Chou
Cell differentiation guidance using chemical stimulation controlled by a microfluidic device
Pages 252-258
Yuta Nakashima and Takashi Yasuda
 Technology Section
Wafer level fabrication of hermetically sealed microcavity with robust metal interconnects for chip cooling application
Pages 259-264
Chao-Tsun Kou, Tzu-Yuan Chao, I.Ta Chiang and Y.T. Cheng
Optimization of a pulsed carbon dioxide snow jet for cleaning CMOS image sensors by using the Taguchi method
Pages 265-271
Sheng-Chung Yang, Keng-Shiang Huang and Yu-Cheng Lin
Synthesis and characterization of patterned and nonpatterned copper and nickel nanowire arrays on silicon substrate
Pages 272-280
Gaurav Sharma, Vaidyanathan Kripesh, Mong Chea Sim and Chorng Haur Sow
Sloping profile and pattern transfer to silicon by shape-controllable 3-D lithography and ICP
Pages 281-286
Jin-Wan Jeon, Jun-Bo Yoon and Koeng Su Lim
3D glass fabrication utilizing electric field and heat treatment induced image mirroring
Pages 287-292
Pan Kyeom Kim, Min Soo Kim and Geunbae Lim
Laser fabrication of high aspect ratio thin holes on biodegradable polymer and its application to a microneedle
Pages 293-302
Seiji Aoyagi, Hayato Izumi, Yuichi Isono, Mitsuo Fukuda and Hiroshi Ogawa
Robust replaceable MEMS packaging for rotor blade integration
Pages 303-309
Christian Gradolph, Thomas Ziemann, Gerhard Müller, Jürgen Wilde and Alois Friedberger
Design and fabrication of polymer microfluidic substrates using the optical disc process
Pages 310-317
Chun-Han Wu, Chun-Hwa Chen, Kuo-Wei Fan, Wen-Syang Hsu and Yu-Cheng Lin
Synthesis and luminescence properties of Sr3MgSi2O8:Eu2+,Dy3+ by a novel silica-nanocoating method
Pages 318-322
Wen Pan and Guiling Ning
Development of dual-etch via tapering process for through-silicon interconnection
Pages 323-329
Ranganathan Nagarajan, Krishnamachar Prasad, Liao Ebin and Balasubramanian Narayanan
Study peeling strength of tape carrier packaging and chip scale packaging
Pages 330-336
Yu-Tang Yen and Yu-Cheng Lin
Development of hafnium oxynitride dielectrics for radio-frequency-microelectromechanical system capacitive switches
Pages 337-342
Yi Zhang, Jian Lu, Kazumasa Onodera and Ryutaro Maeda
Self-alignment of microchips using surface tension and solid edge
Pages 343-349
C. Gary Tsai, C. Max Hsieh and J. Andrew Yeh
Three-dimensional integration scheme with a thermal budget below 300 °C
Pages 350-355
P. Benkart, A. Munding, A. Kaiser, E. Kohn, A. Heittmann, H. Huebner and U. Ramacher
Reprint of “Fabrication of nano-structures using inverse-μCP technique with a flat PDMS stamp”
Pages 356-363
Janggil Kim, Nobuyuki Takama and Beomjoon Kim







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