ISSN: 0924-4247  Vol.154/2



21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, USA, 13-17 January 2008
Edited by John Wood


Date: 24 September 2009


1. Fabrication of post-hydrophilic treatment-free plastic biochip using polyurea film
Pages 187-191
Hidetoshi Shinohara, Yoshikazu Takahashi, Jun Mizuno, Shuichi Shoji
2. Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH
Pages 192-203
Prem Pal, Kazuo Sato, Mitsuhiro Shikida, Miguel A. Gosálvez
3. MEMS fuel cell system integrated with a methanol reformer for a portable power source
Pages 204-211
Taegyu Kim, Sejin Kwon
4. Optimization of an electromagnetic comb drive actuator
Pages 212-217
S. Schonhardt, J.G. Korvink, J. Mohr, U. Hollenbach, U. Wallrabe
5. A doubly decoupled lateral axis micromachined gyroscope
Pages 218-223
X.S. Liu, Z.C. Yang, X.Z. Chi, J. Cui, H.T. Ding, Z.Y. Guo, B. Lv, L.T. Lin, Q.C. Zhao, G.Z. Yan
6. Zinc oxide nanowire electromechanical oscillator
Pages 224-228
Rong Zhu, Dingqu Wang, Shaoqing Xiang, Zhaoying Zhou, Xiongying Ye
7. Micromachined resonators of high Q-factor based on atomic layer deposited alumina
Pages 229-237
Yuan-Jen Chang, Jason M. Gray, Atif Imtiaz, Dragos Seghete, T. Mitch Wallis, Steven M. George, Pavel Kabos, Charles T. Rogers, Victor M. Bright
8. Braille dot display module with a PDMS membrane driven by a thermopneumatic actuator
Pages 238-246
Hyuk-Jun Kwon, Seok Woo Lee, Seung S. Lee
9. Design, optimization and microfabrication of a micro-direct methanol fuel cell with microblocks in anode structure
Pages 247-254
Qian Zhang, Xiaohong Wang, Lingyan Zhong, Yan’an Zhou, Xinping Qiu, Litian Liu
10. High temperature smart-cut SOI pressure sensor
Pages 255-260
Shuwen Guo, Harald Eriksen, Kimiko Childress, Anita Fink, Mary Hoffman
11. Effect of substrate charging on the reliability of capacitive RF MEMS switches
Pages 261-268
P. Czarnecki, X. Rottenberg, P. Soussan, P. Ekkels, P. Muller, P. Nolmans, W. De Raedt, H.A.C. Tilmans, R. Puers, L. Marchand, I. De Wolf
12. An optically interrogated microgyroscope using an out-of-plane lamellar grating
Pages 269-274
Guangya Zhou, Kelvin K.L. Cheo, Yu Du, Fook Siong Chau
13. Micromachined chip-scale plasma light source
Pages 275-280
P. Carazzetti, Ph. Renaud, H. Shea
14. Investigating electrical field-affected skeletal myogenesis using a microfabricated electrode array
Pages 281-287
Yi Zhao
15. A polyethylene glycol (PEG) microfluidic chip with nanostructures for bacteria rapid patterning and detection
Pages 288-294
Jinjiang Yu, Zongbin Liu, Qingjun Liu, King Tai Yuen, Arthur F.T. Mak, Mo Yang, Polly Leung
16. Rubidium vapor cell with integrated Bragg reflectors for compact atomic MEMS
Pages 295-303
Maximillian A. Perez, Uyen Nguyen, Svenja Knappe, Elizabeth A. Donley, John Kitching, Andrei M. Shkel
17. A new characterization method for electrostatically actuated resonant MEMS: Determination of the mechanical resonance frequency, quality factor and dielectric charging
Pages 304-315
S. Kalicinski, H.A.C. Tilmans, M. Wevers, I. De Wolf
18. Optimization of an adaptive PDMS-membrane lens with an integrated actuator
Pages 316-321
F. Schneider, J. Draheim, C. Müller, U. Wallrabe





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