ISSN: 0924-4247  Vol.172/1



Date: December 2011



Editorial Board
Pages i-


Special issue of the Eurosensors XXIV conference, September 5–8, 2010, Linz, Austria
Pages 1-
Bernhard Jakoby, Michael J. Vellekoop

Physical section


Surface patterned polymer micro-cantilever arrays for sensing
Pages 2-8
Prabitha Urwyler, Helmut Schift, Jens Gobrecht, Oskar Häfeli, Mirco Altana, Felice Battiston, Bert Müller


Hydrogen gas sensing properties of Pt/Ta2O5Schottky diodes based on Si and SiC substrates
Pages 9-14
J. Yu, G. Chen, C.X. Li, M. Shafiei, J.Z. Ou, J. du Plessis, K. Kalantar-zadeh, P.T. Lai, W. Wlodarski


Response time of thermal flow sensors with air as fluid
Pages 15-20
C. Sosna, T. Walter, W. Lang


Miniaturized ceramic differential scanning calorimeter with integrated oven and crucible in LTCC technology
Pages 21-26
Wjatscheslaw Missal, Jaroslaw Kita, Eberhard Wappler, Frieder Gora, Annette Kipka, Thomas Bartnitzek, Franz Bechtold, Dirk Schabbel, Beate Pawlowski, Ralf Moos


Analytical and numerical modelling of AlGaN/GaN/AlN heterostructure based cantilevers for mechanical sensing in harsh environments
Pages 27-34
S. Vittoz, L. Rufer, G. Rehder, U. Heinle, P. Benkart


Optical demultiplexer device operating in the visible spectrum
Pages 35-39
P. Louro, M. Vieira, M.A. Vieira, J. Costa, M. Fernandes


A straightforward determination of fluid viscosity and density using microcantilevers: From experimental data to analytical expressions
Pages 40-46
M. Youssry, N. Belmiloud, B. Caillard, C. Ayela, C. Pellet, I. Dufour


Pull-in-based μg-resolution accelerometer: Characterization and noise analysis
Pages 47-53
Rosana A. Dias, Edmond Cretu, Reinoud Wolffenbuttel, Luis A. Rocha


Micro and nano-platforms for biological cell analysis
Pages 54-60
W.E. Svendsen, J. Castillo-León, J.M. Lange, L. Sasso, M.H. Olsen, M. Abaddi, L. Andresen, S. Levinsen, P. Shah, I. Vedarethinam, M. Dimaki


NEMS diaphragm sensors integrated with triple-nano-ring resonator
Pages 61-68
Bo Li, Chengkuo Lee


A digital PLL circuit for resonator sensors
Pages 69-74
J.K. Sell, A.O. Niedermayer, B. Jakoby


Miniature density–viscosity measurement cell utilizing electrodynamic-acoustic resonator sensors
Pages 75-81
Frieder Lucklum, Erwin K. Reichel, Bernhard Jakoby


A resonating rheometer using two polymer membranes for measuring liquid viscosity and mass density
Pages 82-87
M. Heinisch, E.K. Reichel, I. Dufour, B. Jakoby


Contactless inspection of planar electronic devices by capacitive coupling: Development of a model describing the sensor signal and its impact on signal post-processing
Pages 88-97
M. Koerdel, F. Alatas, A. Schick, S.J. Rupitsch, R. Lerch


AlGaN/GaN C-HEMT structures for dynamic stress detection
Pages 98-102
Gabriel Vanko, Milan Držík, Martin Vallo, Tibor Lalinský, Vladimír Kutiš, Stanislav Stančík, Ivan Rýger, Anna Benčurová


GMI detection of magnetic-particle concentration in continuous flow
Pages 103-108
A. García-Arribas, F. Martínez, E. Fernández, I. Ozaeta, G.V. Kurlyandskaya, A.V. Svalov, J. Berganzo, J.M. Barandiaran


Readout methods for an inductively coupled resonance sensor used in pressure garment application
Pages 109-116
Timo Salpavaara, Jarmo Verho, Pekka Kumpulainen, Jukka Lekkala


ZeptoFarad capacitance detection with a miniaturized CMOS current front-end for nanoscale sensors
Pages 117-123
Marco Carminati, Giorgio Ferrari, Filippo Guagliardo, Marco Sampietro


Electro-thermal simulation and characterization of preconcentration membranes
Pages 124-128
R. Inglés, J. Pallares, I. Gràcia, A.M. Gué, J.L. Ramirez


Modeling of an LFE piezoelectric fluid sensor as layered structure in the spectral domain
Pages 129-134
Thomas Voglhuber–Brunnmaier, Bernhard Jakoby


Ultra-low pressure sensor for neonatal resuscitator
Pages 135-139
C. Jacq, T. Maeder, E. Haemmerle, N. Craquelin, P. Ryser


Phototransistors for CMOS Optoelectronic Integrated Circuits
Pages 140-147
P. Kostov, K. Schneider-Hornstein, H. Zimmermann


Integrated metallic gauge in a piezoelectric cantilever
Pages 148-153
M. Cueff, E. Defaÿ, G. Le Rhun, P. Rey, F. Perruchot, A. Suhm, M. Aïd


A realtime and continuous assessment of cortisol in ISF using electrochemical impedance spectroscopy
Pages 154-160
Manju Venugopal, Sunil K. Arya, Ganna Chornokur, Shekhar Bhansali


Utilizing a high fundamental frequency quartz crystal resonator as a biosensor in a digital microfluidic platform
Pages 161-168
Thomas Lederer, Brigitte P. Stehrer, Siegfried Bauer, Bernhard Jakoby, Wolfgang Hilber


High-sensitive pyroelectric detectors with internal thermal amplification
Pages 169-174
Yvonne Querner, Volkmar Norkus, Gerald Gerlach


An imaging system for real-time monitoring of adherently grown cells
Pages 175-180
Nicola Moscelli, Sander van den Driesche, Wojciech Witarski, Silvia Pastorekova, Michael J. Vellekoop


Characterization and simulation of Avalanche PhotoDiodes for next-generation colliders
Pages 181-188
A. Vilà, J. Trenado, A. Arbat, A. Comerma, D. Gascon, Ll. Garrido, A. Dieguez


Precision friction measurement between ultrathin wire and microprobe
Pages 189-194
M.A. Salam Akanda, H. Tohmyoh, M. Saka


Contactless electromagnetic switched interrogation of micromechanical cantilever resonators
Pages 195-203
M. Baù, E. Tonoli, V. Ferrari, D. Marioli


GaAs-based tuning fork microresonators: A first step towards a GaAs-based coriolis 3-axis Micro-Vibrating Rate Gyro (GaAs 3-axis μCVG)
Pages 204-211
I. Roland, S. Masson, O. Ducloux, O. Le Traon, A. Bosseboeuf


A microfluidic capacitance sensor for fluid discrimination and characterization
Pages 212-219
M. Demori, V. Ferrari, P. Poesio, D. Strazza

Interfaces Section


A novel, PLL-based frequency-to-digital conversion mechanism for sensor interfaces
Pages 220-227
H. Danneels, F. Piette, V. De Smedt, W. Dehaene, G. Gielen

Materials & Technology Section


Low-firing thick-film piezoresistive sensors for medical instruments
Pages 228-232
Thomas Maeder, Caroline Jacq, Peter Ryser


NEG thin films for under controlled atmosphere MEMS packaging
Pages 233-239
Lionel Tenchine, Xavier Baillin, Christel Faure, Pierre Nicolas, Eugénie Martinez, Anne-Marie Papon

Actuator Section


Wireless sensor node powered by aircraft specific thermoelectric energy harvesting
Pages 240-244
D. Samson, M. Kluge, Th. Becker, U. Schmid


Modeling and measurement of creep- and rate-dependent hysteresis in ferroelectric actuators
Pages 245-252
Felix Wolf, Alexander Sutor, Stefan J. Rupitsch, Reinhard Lerch


A multi-coil inductive powering system for an endoscopic capsule with vibratory actuation
Pages 253-258
R. Carta, M. Sfakiotakis, N. Pateromichelakis, J. Thoné, D.P. Tsakiris, R. Puers


Double permanent magnet vibration power generator for smart hip prosthesis
Pages 259-268
Raul Morais, Nuno M. Silva, Paulo M. Santos, Clara M. Frias, Jorge A.F. Ferreira, António M. Ramos, José A.O. Simões, José M.R. Baptista, Manuel C. Reis


Macromodel-based simulation and measurement of the dynamic pull-in of viscously damped RF-MEMS switches
Pages 269-279
Martin Niessner, Gabriele Schrag, Jacopo Iannacci, Gerhard Wachutka


Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200 mm wafers
Pages 280-286
Arnaud Pouydebasque, Claudine Bridoux, Fabrice Jacquet, Stéphane Moreau, Eric Sage, Damien Saint-Patrice, Christophe Bouvier, Christophe Kopp, Gilles Marchand, Sébastien Bolis, Nicolas Sillon, Emmanuelle Vigier-Blanc


A single-magnet nonlinear piezoelectric converter for enhanced energy harvesting from random vibrations
Pages 287-292
M. Ferrari, M. Baù, M. Guizzetti, V. Ferrari


A design methodology for fully integrated MEMS and NEMS Pierce oscillators
Pages 293-300
G. Arndt, E. Colinet, J. Arcamone, J. Juillard

Systems/Applications Section


An FPGA-based versatile development system for endoscopic capsule design optimization
Pages 301-307
C. Cavallotti, P. Merlino, M. Vatteroni, P. Valdastri, A. Abramo, A. Menciassi, P. Dario


Characterization of blood samples using image processing techniques
Pages 308-314
Ana Ferraz, Vitor Carvalho, Filomena Soares, Celina P. Leão


A smart medication system using wireless sensor network technologies
Pages 315-321
Wen-Wei Chang, Tung-Jung Sung, Heng-Wei Huang, Wei-Chih Hsu, Chi-Wei Kuo, Jhe-Jhao Chang, Yi-Ting Hou, Yi-Chung Lan, Wen-Cheng Kuo, Yu-Yen Lin, Yao-Joe Yang


Acousto-capacitive tomography of liquid multiphase systems
Pages 322-329
Sebastian Wöckel, Ulrike Hempel, Jörg Auge



Dispensing and hermetic sealing Rb in a miniature reference cell for integrated atomic clocks
Pages 330-335
Fabrizio Vecchio, Vinu Venkatraman, Herbert R. Shea, Thomas Maeder, Peter Ryser


Fabrication of polymer-based micro devices: Formulation and study of the paste
Pages 336-340
Nathalie Serra, Thomas Maeder, Olivier Gentsch, Peter Ryser


Wafer-level bonding and direct electrical interconnection of stacked 3D MEMS by a hybrid low temperature process
Pages 341-346
S. Kühne, C. Hierold


Controlling the initial phase of PECVD growth of vertically aligned carbon nanofibers on TiN
Pages 347-358
Farzan A. Ghavanini, Maria Lopez-Damian, Damon Rafieian, Krister Svensson, Per Lundgren, Peter Enoksson

Handbook of Laboratory Measurements





IMU Market to 2015



Status of the MEMS Industry report



Emerging MEMS Report 2010



Trends in MEMS Manufacturing



MEMS Energy Harvesting Devices Report



MEMS & Sensors for Smartphones



CMOS Image Sensors 2010 report



BioMEMS Market



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