Magnetron Sputtered ZnO Thin Films for Hydrogen Peroxide Vapor Detection

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Vol. 246, Issue 7, November 2020, pp. 23-31

Magnetron Sputtered ZnO Thin Films for Hydrogen Peroxide Vapor Detection

^1, ^* Mikayel ALEKSANYAN, ¹ Vladimir AROUTIOUNIAN, ¹ Valeri ARAKELYAN, ¹ Gohar SHAHNAZARYAN and ¹ Gevorg SHAHKHATUNI

¹ Yerevan State University, Department of Physics of Semiconductors and Microelectronics,
1 A. Manoogian St., Yerevan, 0025, Republic of Armenia ¹ Tel.: + 37460710319, fax: + 37460710355

^* E-mail: maleksanyan@ysu.am

Received: 24 October 2020 /Accepted: 25 November 2020 /Published: 30 November 2020

Abstract: In this study, we report the design and fabrication of a high- performance hydrogen peroxide vapor sensor based on La doped ZnO nanstructured film using the high-frequency magnetron sputtering method. The response (Rgas/Rair) of the sensor was measured at various operating temperature to different concentrations of hydrogen peroxide vapors. It was also studied the gas sensing properties of the sensor by impedance spectroscopy. Gas sensing tests indicate that La-doped ZnO sensor exhibit high sensitivity to low concentration of hydrogen peroxide vapor. We expect that in the future, La doped ZnO nanstructured sensitive thin films will be able to be utilized in highly sensitive, real-time hydrogen peroxide vapor sensors.

Keywords: Zinc oxide, Conductometric sensor, Magnetron sputtering, Hydrogen peroxide vapor, Thin film, Sensitivity.

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