Abstract:
Calorimetry is often used as a material characterization method but needs large amounts of materials to be studied. Determination of reaction heat provides important information about the physical processes that take place during heating up the samples. Recently, the application of solid thin film structures became more important in various fields of surface sciences, microelectronics, coatings, etc. Microcalorimetry is an effective tool for investigating various thin film reactions. The volume of the materials needed for the measurements are limited. New micro-electromechanical membrane type silicon chip of twin micro heaters, electrical control system and temperature calibration method is developed and presented in this paper. The large temperature homogeneity of the heaters, the small volume of material needed for the studies and the sophisticated analog electronics provides a high-quality differential scanning calorimetry signal.
Keywords:
Microcalorimetry, MEMS membrane structure, Microheaters, Signal processing, Temperature feedback and control
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