1) Nano-Structure or Nano-Systems: Opportunities and Pitfalls
P. J. French and C.-K. Yang, pp.1-9
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2) New Trends on MEMS Sensor Technology for Harsh Environment Applications
Patricia M. Nieva, pp.10-20
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3) Healthcare for the Healthy People: Miniaturization, Sensing and Actuation Trends and Needs in Preventive
and Predictive Medicine
Alberto Sanna, Marco Nalin, Riccardo Serafin, pp.21-29
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4) Global Environmental Micro Sensors Test Operations in the Natural Environment (GEMSTONE)
Mark Adams, John Manobianco and Matthew Buza, pp.30-41
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5) Frequency Domain Modeling of SAW Devices for Aerospace Sensors
William Wilson, Gary Atkinson, pp.42-50
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6) Development of Materials and Sensors for the U.S. Army’s Active Coatings Technology Program
James L. Zunino III, pp.51-59
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7) Microfabrication and Characterization of an Integrated 3-Axis CMOS-MEMS Accelerometer
Hongwei Qu, Deyou Fang and Huikai Xie, pp.60-67
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8) Characterization and Optimization Design of the Polymer-based Capacitive Micro-arrayed Ultrasonic Transducer
De-Yi Chiou, Mu-Yueh Chen, Hsu-Cheng Deng, Ming-Wei Chang, pp.68-75
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9) Fabry-Perot Diaphragm Fiber Optic Sensor (DFOS) for Acoustic Detection
Yan Sun, Guanhua Feng, George Georgiou, Edip Niver, Karen Noe and Ken Chin, pp.76-83
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10) Micromechanical GaAs Hot Plates for Gas Sensors
Jiri Jakovenko, Miroslav Husak, Tibor Lalinky, Milan Drzik, pp.84-92
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11) Integration of Microfluidics and Microacoustics Components for Miniature Flow Cytometry Systems
Surendra K. Ravula, Darren W. Branch, Jennifer Sigman, Paul G. Clem, Igal Brener, pp.93-100
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12) Design and Characterization of MEMS Thermal Converter
Jiri Jakovenko, Miroslav Husak, Tibor Lalinky, pp.101-110
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13) Fabrication of a Real Time Reactive Ion Etching Resonant Sensor Using a Low Temperature Sacrificial Polymer
Bryan G. Morris, Paul J. Joseph and Gary S. May, pp.111-123
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14) Perturbation Stochastic Finite Element Analysis of Thermoelastic Quality Factor of Micro-Resonators
Séverine Lepage and Jean-Claude Golinval, pp.124-130
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15) A Semi-Analytical Model for Calculating Touch-Point Pressure and Pull-in Voltage for Clamped Diaphragms
with Residual Stress
Anurekha Sharma and P. J. George, pp.131-139
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16) The Development of Chemical Nanosensors
A. J. Jin, J. Li, Y. Lu, pp.140-146
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