Contents



1) Active Sensing in Ambient Conditions Using an Electrostatically Driven Silicon Microcantilever

G. Keskar, B. Elliott, M. J. Skove, J. Gaillard, S. M. Serkiz and A. M. Rao

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2) MEMS Tunneling Wide Range Micro Thermometer Based on Bimetallic Cantilever Beam

Samrand K. Nezhadian, Shahram Khalilariya, Ghader Rezazadeh

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3) Cantilever Embedded MOSFET Characteristics for Detection of Photosystem I Reaction Centers

Sazia A. Eliza, Ida Lee, Syed K. Islam and Elias Greenbaum

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4) Design and Analysis of Wet Etching Based Comb Type Capacitive Accelerometer

Shankar Dutta, Shaveta, R. Pal, D. K. Bhattacharya, P. Datta and R. Chatterjee

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5) Flexible Membrane LRC Strain Sensor Fabricated Using MEMS Method

Hee C. Lim, James Zunino III and John F. Federici

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6) Influence of Pd Layer on the Sensitivity of CHx/PS/Si as Structure for Oxygen Sensing

N. Ghellai, S. Belhousse, N. Ababou, Y. Ouadah, N. Gabouze

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7) Design of MEMS Cantilever - Hand Calculation

Abhijeet V. Kshirsagar, S. P. Duttagupta, S. A. Gangal

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8) Piezoelectric Zinc Oxide Based MEMS Acoustic Sensor

Aarti Arora, P. J. George, Anil Arora, V. K. Dwivedi, Vinay Gupta

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9) Design and Fabrication of High Sensitive Piezoresistive MEMS Accelerometer

Joshi A. B., Joshi B. P., Sam Baskar S., K. Natarajan, S. A. Gangal

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10) Gaseous Fluidics Control Device

Brahim Dennai, Rachid Khelfaoui, Boumedienne Benyoucef, Belkacem Draoui,Abdelkader Slimani

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11) A Sensor for Gas Detection Fabricated by a Circular Single-wall Carbon Nanotube

Lun-Wei Changa, Yi-Chen Yeha and Juh-Tzeng Lueb

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12) Role of Cu2+ Concentration on the Microstructure and Gas Sensing Properties of Ni1-xCuxFe2O4 (0 ≤ x ≤ 0.8) Ferrite

Elena Rezlescu, Florin Tudorache, Paul Dorin Popa and Nicolae Rezlescu

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13) Sr(II)-added ZnAl2O4 Spinel Composites as an Ammonia Sensor

J. Judith Vijaya, L. John Kennedy, G. Sekaran and K. S. Nagaraja

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14) Odor Sensing with Indium Tin Oxide Thin Films on Quartz Crystal Microbalance

Nirmal Patel, Jay Huebner, Jason Saredy and Brian Stadelmaier

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15) Cobalt Chloride Doped Polymer Film for Relative Humidity Measurement

Pabitra Nath, Hidam Kumarjit Singh, Pranayee Datta, Kanak. Ch. Sarmah

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