Abstract: For the automation of industrial production, the variety of sensors plays a key role. The sensors in question are position sensors, touch sensors, temperature sensors, photo sensors, chemical sensors, etc. Recently, THz sensors joined the sensor family due to their specific property. The most common application of THz sensors is in security, as they have the ability to penetrate the clothes without harming the person. Low-power THz radiation does not damage the cells in the body and does not ionize as X-rays do. Consequently, THz rays can replace X-rays in many applications. This is happening rapidly due to the fast development of the THz wave sources and detectors. This article describes an antenna-coupled nano-bolometer for a THz sensor operating at room temperature. It was developed and manufactured in our laboratory. The key features we focused on are high sensitivity, compact size, and affordable production cost. Some practical examples of the novel THz sensor use are also presented.

Keywords: THz rays, THz sensors, THz image, Security check, Dipole type antenna, Standard microelectronic process, Nano-bolometer array.

__________________________________________________________________________________________