Abstract: Industrial robots (IR) are a cost-effective and highly flexible alternative to machining centres. Nevertheless, their
use for separating processes in production technology is limited because of their low structural rigidity, which results in
comparatively low accuracies. The vibration behaviour of the robots is a major challenge to increasing accuracy, as it can vary
significantly depending on the position of the tool centre point (TCP) in the workspace. To apply vibration compensation, it is
necessary to be able to describe the vibration behaviour of the robot with sufficient accuracy. This article presents a new
approach, utilising parametric FEM simulation to generate a state space description of the robot. The simulation captures the
pose-dependent vibration behaviour of each axis, which is then integrated into a downstream system simulation, resulting in a
comprehensive description of the robot's vibration behaviour. After being finely tuned, the model demonstrates excellent
alignment with the experimentally determined behaviour. Hence, the robot's vibration behaviour in the workspace can be
holistically described, which is a decisive advantage over the limited possibilities of experimental identification.
Keywords: FEM simulation, Dynamic behaviour, Frequency response, Industrial robot.
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